Ultra-precise static-pressure main shaft dynamic characteristic online testing method capable of eliminating measuring basis installation error

A static pressure spindle and measurement datum technology, which is applied in the direction of measuring/indicating equipment, machine gear/transmission mechanism testing, metal processing machinery parts, etc., can solve the influence of measurement datum surface installation accuracy measurement results, and cannot realize ultra-precision static pressure spindle Dynamic performance and other issues, to achieve the effect of accurate and reliable measurement results, simple and easy method, and high measurement accuracy

Active Publication Date: 2015-07-08
HARBIN INST OF TECH
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the existing method cannot realize the online test of the dynamic performance of the ultra-precision static pressure spindle or the installation accuracy of the existing method to measure the reference plane has a serious impact on the measurement result, and provides a method for eliminating the installation error of the measurement reference On-line detection method of dynamic characteristics of ultra-precision static pressure spindle

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  • Ultra-precise static-pressure main shaft dynamic characteristic online testing method capable of eliminating measuring basis installation error

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specific Embodiment approach 1

[0010] Specific implementation mode one: combine figure 1 Describe this embodiment, the online testing method described in this embodiment is based on including vertical ultra-precision direct drive hydrostatic spindle system, measurement system and computer data acquisition and processing system 22 to realize;

[0011] Vertical ultra-precision direct-drive hydrostatic spindle system includes servo motor, ultra-precision direct-drive hydrostatic spindle or direct-drive ultra-precision hydrostatic spindle rotor (rotating part, namely rotor part), machine tool beam support plate (machine tool beam cover plate) 11, spindle bushing 14 (stator part), machine beam 16, micro-feed tool holder 17 and diamond cutter 18; the ultra-precision direct-drive hydrostatic spindle consists of input end components 10 coaxially arranged from top to bottom 1, the upper thrust plate 12, the shaft center 13, and the lower thrust plate 15 are fixedly connected; the servo motor includes a motor stator ...

specific Embodiment approach 2

[0014] Specific implementation mode two: combination figure 1 Describe this embodiment, the specific implementation process of an ultra-precision static pressure spindle dynamic characteristic online detection method that eliminates the installation error of the measurement reference described in this embodiment is: Step 1, install the measurement reference: install the standard ball 4 on the static pressure In the tapered installation datum plane 5 processed at the rear end of the spindle system, the lower end of the detection rod 4-1 is fixed inside the input end component 10 (hollow spindle) of the direct-drive ultra-precision static pressure spindle through a nut; step 2, install High-precision displacement sensor: First, fix the high-precision displacement sensor bracket 2 on the casing of the motor stator, and then install two high-precision displacement sensors 1 and 3 through the mounting holes on the bracket 2, and install one of the high-precision displacement sensor ...

specific Embodiment approach 3

[0015] Specific implementation mode three: combination figure 1 To illustrate this embodiment, the standard ball of this embodiment is ground and polished, and the material is special stainless steel. After polishing, the PV value of the surface shape accuracy is better than λ / 20 (wherein λ=0.633 μm), and the surface roughness is better than 2nm. Other compositions and connections are the same as those in Embodiment 1 or Embodiment 2.

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Abstract

The invention discloses an ultra-precise static-pressure main shaft dynamic characteristic online testing method capable of eliminating a measuring basis installation error and relates to the field of static-pressure main shaft dynamic characteristic testing. The method solves the problems that an existing method cannot achieve ultra-precise static-pressure main shaft dynamic characteristic online testing or a measurement result can be seriously influenced by the installation precision of a measuring reference plane according to the existing method. According to the ultra-precise static-pressure main shaft dynamic characteristic online testing method capable of eliminating the measuring basis installation error, a cone-shaped installation reference plane is machined at the rear end of a direct-driven ultra-precise static-pressure main shaft rotator, a standard ball is directly installed on the cone-shaped reference plane to serve as a measuring basis, two high-precision displacement sensors are adopted to measure the displacement change between the standard ball and the two high-precision displacement sensors when the main shaft rotates, the measured displacement change values are converted into a digital signal through a sensor signal amplification and data collection system and the digital signal is sent to a computer for data analysis and data processing, and then the ultra-precise direct-driven static-pressure main shaft dynamic characteristic online testing is achieved. Due to the fact that two channels are adopted to carry out measurement at the same time, detection of the axial deviation of the main shaft and detection of the radial deflection of the main shaft are achieved at the same time.

Description

technical field [0001] The invention relates to a method for detecting the dynamic characteristics of an ultra-precision static pressure spindle, and relates to the field of detection of the dynamic characteristics of a static pressure spindle. Background technique [0002] With the rapid development of modern science and technology, especially the rapid advancement of cutting-edge science and technology such as aviation, aerospace, national defense, and military industry, these industries have higher and higher requirements for product stability and performance. The typical example is laser nuclear fusion. The KDP crystal device is widely used in the system. Due to the characteristics of the crystal such as soft, brittle, and easy to deliquescence, traditional optical processing methods such as grinding and polishing cannot be used for processing large-diameter KDP crystals. The main means of crystal final processing. Cutting processing is a kind of copy processing, and th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23Q17/00G01M13/02
Inventor 张勇付鹏强张飞虎梁迎春张强张龙江
Owner HARBIN INST OF TECH
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