High-temperature co-firing ceramic slurry and preparation method thereof
A technology of high-temperature co-fired ceramics and slurry, applied in the field of semiconductor manufacturing, can solve the problems of limited range of resistance temperature coefficient, difficult to meet different requirements of different resistance electronic components, etc., and achieve the effect of less production equipment and simple preparation process
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[0020] 1) Prepare the ceramic powder A by performing 24-hour dry powder ball milling on the inorganic additives in proportion;
[0021] 2) Dry porcelain powder A, tungsten powder and molybdenum powder in proportion, sieve, and quickly ball mill for 1 hour to obtain mixed powder B;
[0022] 3) Add the organic vehicle to the mixed powder B in proportion, and roll it into a slurry through a three-roll mill.
[0023] The high temperature co-fired ceramic slurry formula and test temperature coefficient of resistance (TCR) are as follows:
[0024]
[0025] Note: The test temperature range of TCR is 25℃-600℃.
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