Mask pattern correction method
A graphics and mask technology, applied in the field of mask graphics correction, can solve the problems of large amount of pixelated mask data, computing speed bottlenecks, and inability to make mask manufacturing tools, and achieve the effect of improving computing speed
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[0044] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0045] First, the desired exposure pattern is defined as the initial mask pattern. Then, according to the accuracy required by the mask or the accuracy that can be corrected, the edge of the initial mask pattern is segmented, that is, the polygonal pattern of the circuit on the mask is transformed into one or a limited number of standard unit patterns that are linearly superimposed and described.
[0046] Such as figure 1 As shown, a typical mask pattern can be represented by a polygon, and the coordinates of each vertex of each pattern area can be defined in order. Usually, the edges of the mask pattern are all 0-degree or 90-degree directions.
[0047] Such as figure 2 As shown, a standard cell graph can be defined as follows:
[0048] Define a two-dimensional coordinate system. In this coordinate system, the value of the transparent ar...
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