Manufacture method of ridge type Y-branch optical waveguide structure

Abstract

The invention relates to a manufacture method of a ridge type Y-branch optical waveguide structure. The method comprises the steps that a base plate is provided, the base plate comprises a T-shaped ridge part and a flat part connected with the ridge part, and the flat part comprises a load plane; a light guiding layer covering the ridge part and the load plane is formed on the base plate; a light resistant layer is formed on the surface of the light guiding layer; a Y-shaped etching barrier layer is formed on the light guiding layer by carrying out exposure and development on the light resistant layer, the Y-shaped etching barrier layer comprises a barrier layer forfication structure, and the orthographic projection of the barrier layer forfication structure is located on the load plane; a Y-branch optical waveguide corresponding to the Y-shaped etching barrier layer is formed by etching the light guiding layer, and the Y-branch optical waveguide comprises an optical waveguide forfication structure located on the load plane; finally the Y-branch optical waveguide is formed in the base plate.

Description

technical field [0001] The invention relates to a method for manufacturing an optical waveguide, in particular to a method for manufacturing a ridge-shaped Y-branched optical waveguide structure. Background technique [0002] In the optical communication network, the Y-branch optical waveguide structure (1×2 balanced-ridge type) is used to divide one optical signal into two optical signals or combine two optical signals into one optical signal. Combining a plurality of such Y-branched optical waveguide structures can produce branched optical waveguide structures of 1×4, . . . 1×N structure. [0003] At present, the general method of making the Y-branched optical waveguide structure is as follows: first, a Y-shaped substrate is fabricated by wet etching, and then a Y-branched optical waveguide is formed on the Y-shaped substrate, and then the Y-branched optical waveguide is diffused to the Y-shaped substrate. inside the shaped substrate. However, when the Y-shaped substrate...

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Problems solved by technology

However, when the Y-shaped substrate is produced by wet etching, the etchant cannot enter the acute-angled region of the Y-shaped photoresist layer (the acute angle is less than 1 degree) due to the influence of surface tension, resulting in Incomplete etching of the bifurcated sidewall of the Y-shaped substrate will eventually lead to a large unexpected propagation loss when the Y-branched optical waveguide structure is applied to communication propagation

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