MEMS-Based Calorimeter and Related Manufacturing and Application
A calorimetry, adiabatic technology, applied in the field of thermal analysis, which can solve the problems of slow thermal reaction, large consumption of samples and reagents, and complex design
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example 1
[0058] Example 1: Fabrication of Micro Devices
[0059] This example illustrates the fabrication steps of the microdevice, generally following the steps described above and Figure 2. In particular, a 6-μm-thick polyimide film was spin-coated on a silicon wafer (precoated with silica). A residual wafer layer approximately 50 μm thick was etched with tetramethylammonium hydroxide (TMAH) on the backside of the wafer corresponding to the calorimetric chamber. To cure the polyimide, a chromium / gold film (5 / 200 μm) is deposited on the polyimide layer by thermal evaporation. Apply a second layer of polyimide over the micro heater and temperature sensor. Then, thermal evaporation and replication of tellurium and bismuth thin films (0.5 and 1.2 μm) were performed by standard lift-off procedures to form a 50-junction thermopile. A layer of polyimide and polydimethylsiloxane (PDMS) mixture was further coated on the thermopile. The calorimetric chamber shielding structure is fabricate...
example 2
[0060] Example 2: Calorimetry
[0061] In this example, a microdevice fabricated according to Example 1 was calibrated and used to measure the thermodynamic properties of specific biomolecules, such as the thermodynamics of protein denaturation.
[0062] A. Principle
[0063] Differential scanning calorimetry (DSC) measures the differential heat capacity, which is the difference in the heat capacities of a sample substance and a reference substance with respect to temperature. The same temperature scan is performed on the sample substance and the standard substance, that is, when their temperature changes at a predetermined rate within the research range, thermally induced molecular activities of the sample (exothermic or endothermic) will cause a slight difference between the sample substance and the standard substance. Temperature difference (i.e. temperature difference). Detect this temperature difference to reflect the power difference
[0064] ΔP=P s -P r (1)
[006...
example 3
[0083] Example 3: AC - Differential Scanning Calorimetry (DSC) measurement
[0084] This example illustrates a method for performing AC-DSC measurements, as described above, based on the published microdevice. This microelectromechanical system (MEMS) AC-DSC method enables the measurement of low-abundance biomolecules with higher accuracy, the same as the device's AC-DSC measurement for lysozyme denaturation.
[0085] A. Principle
[0086] AC-DSC can monitor the difference in heat capacity, that is, the difference in heat capacity between a sample and a standard substance, by changing the temperature of the substance at a constant rate using an insulated enclosure with temperature control. And accompanied by a brief periodic change, between samples and standard substances ( image 3 ) on the same AC modulation heat applied. The difference in heat capacity is obtained by measuring the temperature difference (i.e. the temperature difference between the sample substance and th...
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