Micro-cavity type OLED based on nanometer silicon thin film composite anode and manufacturing method thereof
A nano-silicon film and composite anode technology, which is applied in the manufacture of semiconductor/solid-state devices, electrical components, and electrical solid-state devices, etc., can solve the problems of low luminous efficiency and luminous brightness of devices, easy formation of deviations, and unfavorable three-primary color synthesis color, etc. Achieve the effect of improved color coordinates, increased light intensity and good color purity
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[0024] refer to figure 1 , the present invention is based on the nano-silicon thin film composite anode 3 microcavity OLED, including a substrate 1 and including a microcavity 4 formed between two electrodes composed of a cathode 2 and an anode 3, and the microcavity 4 includes a plurality of organic layer, the organic layer has at least one light-emitting layer, and the anode 3 is made of a P-type doped nanocrystalline silicon film 31 and an indium tin oxide (ITO) layer 32. The P-type doped nanocrystalline silicon The thin film 31 is located above the substrate 1, wherein the anode 3 can be expressed as "P+-nc-Si:H / ITO". The reason why the microcavity 4 is formed between the two electrodes composed of the cathode 2 and the anode 3 is that the P-nc-Si:H thin film material has optical characteristics approximately transflective and semitransparent, and it and the cathode 2 with high reflectivity make the OLED produce The microcavity effect can narrow the emission spectrum, nar...
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