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Equipment for preparing polycrystalline silicon

A technology of polysilicon and equipment, applied in the direction of silicon, etc., can solve the problems of polysilicon preparation process and equipment that need to be improved, and achieve the effects of improving efficiency, reducing production costs, and reducing costs

Active Publication Date: 2013-12-18
CHINA ENFI ENGINEERING CORPORATION +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the preparation process and equipment of polysilicon still need to be improved at this stage.

Method used

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  • Equipment for preparing polycrystalline silicon
  • Equipment for preparing polycrystalline silicon
  • Equipment for preparing polycrystalline silicon

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Experimental program
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Embodiment 1

[0121] use Figure 3-Figure 11 The equipment for preparing polysilicon shown in the present invention, with reference to figure 1 with figure 2 As shown in the flow process, polysilicon is prepared according to the following process steps:

[0122] (1) Synthesis step of hydrochlorination: Silicon tetrachloride and hydrogen from the following steps (2) and (3) are mixed in a gas-liquid mixer, then exchange heat with the hydrogenation reactor outlet gas, and enter resistance heating Heating to a certain temperature, the mixed gas directly enters the hydrogenation reactor, the temperature is controlled at 500-550 degrees, the pressure is 1.5-3.5MPa, the ratio of silicon tetrachloride to hydrogen is 1:2-1:5, nickel-based or copper-based Under the action of catalyst, it reacts with silicon powder. After the reaction gas passes through the high-efficiency gas-solid dust collector, it exchanges heat with the gas from the gas-liquid mixer in the gas-gas heat exchanger, and the coo...

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Abstract

The invention discloses equipment for preparing polycrystalline silicon. The equipment comprises a chlorhydrogenation synthetic reaction device which is used for carrying out chlorhydrogenation synthetic reaction on silicon powder, hydrogen gas and at least one of chlorine hydride and silicon tetrachloride, a first rectification purification device which is used for carrying out first rectification purification treatment on chlorhydrogenation synthetic reaction products containing trichlorosilane, a disproportionation reaction device which is used for carrying out disproportionation reaction on trichlorosilane, a second rectification purification device which is used for carrying out second rectification purification treatment on disproportionation reaction products, and a pyrolytic reaction device which is used for carrying out pyrolytic reaction on silicane gas to obtain the polycrystalline silicon. The equipment is utilized to prepare electronic-grade polycrystalline silicon effectively, and the technology involving the equipment is simple and safe, has energy-saving and environment-friendly effects and is low in cost, the purity of the produced polycrystalline silicon is high, generated tail gas and waste residues can meet the environment-protection requirement, and the technology is applied to cleaner production of the electronic-grade polycrystalline silicon.

Description

technical field [0001] The invention relates to the technical field of photovoltaic industry, in particular to equipment for preparing polysilicon. Background technique [0002] As a renewable and clean energy source, solar energy has attracted global attention, and the technology of using solar energy resources to generate electricity has been considered as the most promising new energy technology in the world today. Therefore, the photovoltaic industry with solar power generation technology as the core has developed rapidly in the early 21st century. As the main raw material of the photovoltaic industry, polysilicon has seen a sharp increase in demand with the rapid development of the photovoltaic industry. [0003] However, the preparation process and equipment of polysilicon still need to be improved at this stage. Contents of the invention [0004] The present invention has been accomplished based on the following findings of the inventors: [0005] At present, the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/03
Inventor 万烨张升学严大洲毋克力肖荣辉汤传斌杨永亮
Owner CHINA ENFI ENGINEERING CORPORATION
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