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Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer

A spectral ellipsometer and smoothing technology, applied in the field of spectral ellipsometer, can solve the problems of loss of measurement information, measurement, affecting measurement accuracy, etc., and achieve the effect of smoothing the light intensity curve

Active Publication Date: 2013-12-25
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

Although this method can guarantee the measurement accuracy in the ultraviolet to visible bands, due to the full range of some infrared bands, the spectroscopic ellipsometer cannot measure the sample in the corresponding band, thereby losing measurement information and affecting the measurement accuracy.

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  • Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer
  • Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer
  • Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer

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Embodiment Construction

[0040] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted here that the descriptions of these embodiments are used to help understand the present invention, but are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0041] like figure 1 Shown is a schematic structural diagram of a dual-rotating compensator type spectroscopic ellipsometer in this embodiment. In order to apply this spectroscopic ellipsometer to a wide spectral range from ultraviolet to near infrared, the output spectrum 2 of light source 1 must cover the full spectral range. When using a xenon lamp as the light source 1, such as figure 2 As shown, the intensity of its output spectrum 2 varies greatly from ultravio...

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Abstract

The invention discloses a light intensity smoothing device and method of xenon lamp light sources in a spectrum ellipsometer. The light intensity smoothing device comprises a collimating lens, a convergent lens and a diaphragm, wherein the collimating lens is an achromatic lens, and is used for collimating to-be-processed xenon lamp light rays into parallel light beams; the convergent lens is a single lens, and is used for converging and focusing the parallel light beams, and the sizes of light spots after convergence increase along with the increasing of wavelengths; the diaphragm is arranged behind the convergent lens and at the focal length part at an interval of certain wavelength, and the size of the diaphragm is set to ensure that light spots at an ultraviolet wave band can pass through the diaphragm while light spots at a visible near-infrared wave band are blocked, thereby reducing the light intensity of light beams at the visible near-infrared wave band and further achieving smoothness. The invention also discloses a xenon lamp light ray intensity smoothing method. According to the invention, light rays at any wave band are not lost, and a detector or a spectrograph can normally respond to light rays at a full-spectrum range, so that the spectrum ellipsometer can perform accurate measurement in a full-spectrum range from ultraviolet to near-infrared.

Description

technical field [0001] The invention belongs to the technical field of spectroscopic ellipsometers, and in particular relates to a light intensity smoothing device and method for a xenon lamp light source in a spectroscopic ellipsometer. Background technique [0002] Ellipsometer (ellipsometer for short) is a general-purpose optical measuring instrument that uses the polarization characteristics of light to obtain information about the sample to be measured. The basic principle is to project special elliptically polarized light onto the surface of the sample to be measured through a polarizer, and measure the reflected light (or transmitted light) of the sample to obtain the polarization state change of the polarized light before and after reflection (or transmission) (including amplitude ratio and phase difference), and then extract the information of the sample to be tested. Commonly used ellipsometers are divided into single-wavelength ellipsometers and spectral ellipsom...

Claims

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Application Information

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IPC IPC(8): G01N21/01G01N21/21
Inventor 刘世元李伟奇张传维陈修国
Owner HUAZHONG UNIV OF SCI & TECH
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