Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer

A spectral ellipsometer and smoothing technology, applied in the field of spectral ellipsometer, can solve the problems of loss of measurement information, measurement, affecting measurement accuracy, etc., and achieve the effect of smoothing the light intensity curve

Active Publication Date: 2013-12-25
HUAZHONG UNIV OF SCI & TECH
View PDF9 Cites 9 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this method can guarantee the measurement accuracy in the ultraviolet to visible bands, due to the full range of some infrared bands, the spect

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer
  • Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer
  • Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0040] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted here that the descriptions of these embodiments are used to help understand the present invention, but are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0041] like figure 1 Shown is a schematic structural diagram of a dual-rotating compensator type spectroscopic ellipsometer in this embodiment. In order to apply this spectroscopic ellipsometer to a wide spectral range from ultraviolet to near infrared, the output spectrum 2 of light source 1 must cover the full spectral range. When using a xenon lamp as the light source 1, such as figure 2 As shown, the intensity of its output spectrum 2 varies greatly from ultravio...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a light intensity smoothing device and method of xenon lamp light sources in a spectrum ellipsometer. The light intensity smoothing device comprises a collimating lens, a convergent lens and a diaphragm, wherein the collimating lens is an achromatic lens, and is used for collimating to-be-processed xenon lamp light rays into parallel light beams; the convergent lens is a single lens, and is used for converging and focusing the parallel light beams, and the sizes of light spots after convergence increase along with the increasing of wavelengths; the diaphragm is arranged behind the convergent lens and at the focal length part at an interval of certain wavelength, and the size of the diaphragm is set to ensure that light spots at an ultraviolet wave band can pass through the diaphragm while light spots at a visible near-infrared wave band are blocked, thereby reducing the light intensity of light beams at the visible near-infrared wave band and further achieving smoothness. The invention also discloses a xenon lamp light ray intensity smoothing method. According to the invention, light rays at any wave band are not lost, and a detector or a spectrograph can normally respond to light rays at a full-spectrum range, so that the spectrum ellipsometer can perform accurate measurement in a full-spectrum range from ultraviolet to near-infrared.

Description

technical field [0001] The invention belongs to the technical field of spectroscopic ellipsometers, and in particular relates to a light intensity smoothing device and method for a xenon lamp light source in a spectroscopic ellipsometer. Background technique [0002] Ellipsometer (ellipsometer for short) is a general-purpose optical measuring instrument that uses the polarization characteristics of light to obtain information about the sample to be measured. The basic principle is to project special elliptically polarized light onto the surface of the sample to be measured through a polarizer, and measure the reflected light (or transmitted light) of the sample to obtain the polarization state change of the polarized light before and after reflection (or transmission) (including amplitude ratio and phase difference), and then extract the information of the sample to be tested. Commonly used ellipsometers are divided into single-wavelength ellipsometers and spectral ellipsom...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01N21/01G01N21/21
Inventor 刘世元李伟奇张传维陈修国
Owner HUAZHONG UNIV OF SCI & TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap