Sheet resistance tester and test method for nondestructive measurement of thin-layer materials

Abstract

The invention discloses a square resistance tester allowing nondestructive measurement to be performed on thin-layered materials and a testing method thereof. The square resistance tester includes a ruby four-point probe head, a testing frame, a host computer, a measurement control system, a testing-voltage adjuster and a constant current source on-off switch. The host computer internally comprises a constant current source circuit and a power circuit; the testing-voltage adjuster is arranged between the power circuit and the four-point probe head and used for adjusting the testing voltage between two outer probes in the four-point probe head before testing; the constant current source on-off switch is arranged between the constant current source circuit and the four-point probe head and used for controlling switching on of the constant current source circuit only when the tips of the probes completely make contact with the surfaces of the thin-layered materials in a pressed mode. The invention further discloses the testing method based on the square resistance tester. According to the square resistance tester allowing nondestructive measurement to be performed on the thin-layered materials and the testing method thereof, the testing voltage between the first probe and the fourth probe can be adjusted so that a high-voltage breakdown is avoided; due to the facts that the ruby four-point probe head has a moderate curvature radius and pressure, and the pressure of the probes can be changed within the wide range of 25-250 grams, the square resistance tester and the testing method thereof can be widely applied to measuring various novel thin-layered materials.

Description

technical field [0001] The invention relates to the research field of sheet resistance testers, in particular to a sheet resistance tester for non-destructive measurement of thin-layer materials and a testing method thereof. Background technique [0002] Coating and thin film materials mainly refer to thin layer materials formed on silicon substrates by diffusion layer, epitaxy, ion implantation, chemical vapor phase or other deposition processes. Sheet resistance (also known as surface resistance) is the development and production of thin layer materials Important parameters that must be measured during the process. At present, the commonly used test method for sheet resistance of thin-layer materials at home and abroad is the four-probe method, and its test device is generally composed of four-probe heads, a test frame, a host computer, and a measurement control system. The test frame includes a sample stage and a cantilever. The four-probe head is fixed on the cantilever...

AI Technical Summary

Problems solved by technology

[0003] However, in the existing sheet resistance testing equipment for thin-layer materials, the voltage at both ends of the 1 and 4 current probes is often too large, and there is no measurement protection device, which is prone to electrical breakdown and causes electrical damage to the thin-layer material; The radius of curvature of the needle probe is generally too small, and the contact pressure is too large, which will cause mechanical damage to the thin layer of material through pressure penetration or fracturing

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