Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof

A sound pressure sensor, graphene film technology, applied in measuring devices, measuring ultrasonic/sonic/infrasonic waves, instruments, etc., can solve the problem of low sensor sensitivity, and achieve the effects of small size, high reliability and simple production

Active Publication Date: 2014-02-05
BEIHANG UNIV
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Problems solved by technology

The sensor is composed of a single-mode optical fiber, a zirconia ferrule and a graphene film, which can solve the problem of the F-P cavity pressure sensor in the prior art caused by the interference cavity length manufacturing process and the film thickness of the used diaphragm. The problem of low sensitivity

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  • Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof
  • Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof
  • Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof

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[0030] The present invention will be described in detail below in conjunction with the accompanying drawings. As a part of this description, the principle of the present invention will be described through implementation. Other aspects, features and advantages of the present invention will become clear through the detailed description.

[0031] figure 1 It is a structural schematic diagram of the fiber optic acoustic pressure sensor based on the graphene film of the present invention. The sensor probe part 14 is mainly composed of a single-mode optical fiber 11 , a zirconia single-mode ferrule 12 and a graphene film 13 . The single-mode optical fiber 11 is an optical fiber connector with a single-mode pigtail. The single-mode pigtail is a single-mode bare optical fiber with an outer diameter of 125±0.7 μm and a core of 10.4±0.5 μm. The zirconia single-mode ferrule 12 is a single-mode ceramic ferrule with an outer diameter of 2.5 mm, an inner diameter of 126 ± 1 μm, and a leng...

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Abstract

The invention discloses an optical fiber Fabry-Perot sound pressure sensor manufacturing method based on a graphene membrane and a measuring method and device thereof. A sensor is manufactured based on the graphene membrane and the optical fiber Fabry-Perot interference optical principle. Firstly, a single mode fiber is rinsed and processed, the graphene membrane is transferred, and the graphene membrane is adsorbed to a zirconium oxide single mode inserting core; then, the zirconium oxide single mode inserting core is inserted into the processed single mode fiber from the other end. Therefore, two reflecting surfaces of Fabry-Perot interference are formed by the end face of the single mode fiber and the graphene membrane, an optical fiber-air-graphene membrane interference cavity is formed, an interference cavity length detecting device is set up, interference spectrum signals are demodulated by using a two-peak method, and the high sensitivity detection of weak sound pressure signals is achieved. The sensor has the advantages of being simple in manufacturing, high in sensitivity, small in size, resistant to electromagnetic interference and the like, the problem that a sensor is low in sensitivity due to the limitation of the reduction of the thickness of a membrane in the prior art is solved, the sensitivity of the membrane type sound pressure sensor is improved, and the sensor can be expected to be applied to the underwater sound field, the electroacoustic field, medical field, biomedical engineering filed and the like.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensing, in particular to a method for manufacturing a graphene-film-based optical fiber Perot acoustic pressure sensor and a measurement method and device thereof. Background technique [0002] Optical fiber Fab sensor is a kind of optical fiber sensor with the longest history, the most mature technology and the most widely used. Due to its advantages of being suitable for long distances, small spaces, and harsh environments, it has been widely used in aerospace, military ships, environmental testing, biomedicine, and other fields. [0003] Micro-optical fiber F-P cavity acoustic pressure sensors are usually capillary structure and diaphragm structure, but the pressure sensor with capillary structure has low sensitivity to pressure perception, which is not conducive to the measurement of small pressure range. For the diaphragm F-P structure, the two key factors are the interference cavity ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H9/00
Inventor 李成郭婷婷樊尚春肖俊
Owner BEIHANG UNIV
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