Method for measuring wire resistance of ITO (indium tin oxide) circuit

Abstract

The invention discloses a method for measuring the wire resistance of an ITO (indium tin oxide) circuit. The method comprises the following steps: (1) plating an ITO layer on a substrate by sputtering, and then measuring sheet resistance R of the ITO; (2) manufacturing a unit circuit in a preset shape on the ITO; (3) scanning the longitudinal length and the horizontal length of each component of the preset shape on the ITO by using a metalloscope according to the preset shape of the unit circuit; (4) directly calculating the resistance of each component of the unit circuit by virtue of the longitudinal length and the horizontal length according to the conversion between the sheet resistance and the wire resistance; and (5) accumulating the resistance of each component of the unit circuit to obtain the wire resistance of the unit circuit. The method disclosed by the invention can reduce the risk of easily damaging an ITO conductive film due to manual use of a universal meter, and improves the production yield.

Description

technical field [0001] The invention relates to a method for measuring and calculating the line resistance of an ITO line, belonging to the field of touch panel technology research, wherein ITO is an indium tin oxide conductive film, which is usually based on a soda-calcium-based or silicon-boron-based substrate glass. A layer of indium tin oxide is plated by magnetron sputtering. Background technique [0002] At present, the structure of the touch panel produced in the touch panel (touch panel, also known as touch screen, touch panel) industry is generally to sputter one or more layers on a glass substrate or PET (Polyethylene terephthalate, polyethylene terephthalate). A layer of ITO with a certain thickness is etched to form an ITO line of a certain shape. When the user touches it, the mutual capacitance of the sensing unit at the intersection of the surface row or column will change. According to the above changes, the touch IC (integrated circuit, integrated circuit ) ...

AI Technical Summary

Problems solved by technology

This method is time-consuming and cumbersome to operate, especially for large-size touch panels, with a large number of ITO lines, which takes a long time to measure and reduces production efficiency

[0005] On the other hand, due to manual measurement with a multimeter, improper operation methods will cause damage to the ITO line, causing the entire panel to be scrapped, and personnel measurement errors will cause inaccurate measurement results, increasing the number of unqualified products being regarded as qualified products. The possibility of continuing the follow-up process increases the production cost of the follow-up process and reduces the production yield; what's more, due to the failure to detect the unqualified products in time, the unqualified products flow into customers, and the resulting losses are very serious.

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