Method and device for manufacturing a fiber optic microring resonator
A technology of a micro-ring resonator and a manufacturing method, applied in the field of optical fiber integration, can solve the problems of obstruction, low coupling efficiency, and high production cost, and achieve the effects of simple manufacturing process, improved coupling efficiency, and improved production efficiency
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[0028] The present invention will be further elaborated below in conjunction with the accompanying drawings and specific embodiments.
[0029] Such as figure 1 Shown is a schematic diagram of a manufacturing method of an optical fiber microring resonator according to an embodiment of the present invention, which specifically includes the following steps:
[0030] A1. Coating a layer of waveguide material film on the end face of a section of optical fiber;
[0031] The refractive index of the waveguide material film is larger than that of the optical fiber material. The larger the refractive index of the selected waveguide material film is, the smaller the bending loss is. In actual operation, pure silicon film, silicon nitride film and silicon nitride film can be used. film, or a polymer optical waveguide material as the coating material, and silicon nitride material is selected as the coating material in the embodiment of the present invention.
[0032] The specific operati...
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