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Optical fiber pressure sensor with temperature measurement function

A pressure sensor and temperature measurement technology, which is applied in the direction of measuring fluid pressure, measuring force, and measuring the change force of optical properties of materials when they are stressed, can solve the problem of weakening or even disappearing of fiber gratings, affecting the accuracy of temperature measurement, Can not meet the problems of high-precision pressure sensor, etc., to achieve the effect of light weight, simple structure and high sensitivity

Inactive Publication Date: 2014-03-19
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is common to use fiber gratings for temperature compensation, but fiber gratings will gradually weaken or even disappear under long-term high-temperature environments, which affects the accuracy of temperature measurement and cannot meet the requirements of high-precision pressure sensors

Method used

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  • Optical fiber pressure sensor with temperature measurement function
  • Optical fiber pressure sensor with temperature measurement function
  • Optical fiber pressure sensor with temperature measurement function

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] Such as figure 1 As shown, an optical fiber pressure sensor with temperature measurement function, the pressure sensor sensing head includes a diaphragm 1, a temperature measurement layer 3, a cavity bottom 4, an adhesive 5 and a light guide fiber 6;

[0031] There is a groove on the top of the cavity bottom 4, and the temperature measuring layer 3 is sputtered or evaporated on the bottom of the groove. The diaphragm 1 and the cavity bottom 4 are bonded together by anodic bonding, and a gap is formed between the diaphragm 1 and the groove. F-P vacuum chamber 2;

[0032] A horn hole is drilled at the bottom of the cavity bottom 4, and a layer of adhesive 5 is bonded to the inner wall of the horn hole, and a light-guiding optical fiber 6 is placed in the horn hole.

Embodiment 2

[0034] Such as figure 2 As shown, an optical fiber pressure sensor with a temperature measurement function, the pressure sensor sensing head includes a diaphragm 1, a temperature measurement layer 3, a cavity bottom 4, an adhesive 5, a light guide fiber 6 and a collimator 7;

[0035] There is a groove on the top of the cavity bottom 4, and the temperature measuring layer 3 is sputtered or evaporated on the bottom of the groove. The diaphragm 1 and the cavity bottom 4 are bonded together by anodic bonding, and a gap is formed between the diaphragm 1 and the groove. F-P vacuum chamber 2;

[0036] The collimation tube 7 is fixedly connected to the bottom end of the cavity bottom 4 through an adhesive 5;

[0037] A circular hole is drilled at the bottom of the collimating tube 7, and a layer of adhesive 5 is bonded to the inner wall of the circular hole, and a light-guiding optical fiber 6 is placed in the circular hole.

[0038] Such as figure 2 As shown, the diaphragm 1 ado...

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Abstract

The invention relates to the technical field of optical fiber pressure sensors, and particularly relates to an optical fiber pressure sensor with a temperature measurement function. The optical fiber pressure sensor provided by the invention is simple in structure, small in size, light in weight, high in sensitivity, adjustable and convenient in installation and use, and can be applied to the fields such as petroleum, aviation, chemical engineering and the like. Compared with the prior art, the optical fiber pressure sensor measures the temperature by using a semiconductor silicon temperature measuring layer, carries out real-time correction on a pressure measurement result of the sensor, improves a problem that a traditional fiber bragg grating gradually weakens or even disappears in a high-temperature environment for a long time, and has higher measurement accuracy.

Description

technical field [0001] The invention relates to the technical field of optical fiber pressure sensors, in particular to an optical fiber pressure sensor with temperature measurement function. Background technique [0002] With the development of fiber optic sensor technology, research on high-precision fiber optic pressure sensors has become more and more in-depth. As a new type of sensor, the optical fiber pressure sensor has the advantages of small size, light weight, and anti-electromagnetic interference. It has been widely used in petroleum, aviation, chemical, medical and other fields. Optical fiber Fabry-Perot (F-P) sensor is a kind of optical fiber pressure sensor. It usually consists of an optical fiber end face and a diaphragm end face to form a F-P resonant cavity. When the pressure acts on the diaphragm, the diaphragm deforms, thus changing The cavity length of the F-P cavity causes the change of the interference spectrum to realize the sensing. [0003] In prac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/24G01L1/26G01L11/02G01L19/04
Inventor 张慧君张力段玉培黄彩霞
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA