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Micro-nano scale coupling vibration high-resolution measurement method

A technology of coupling vibration and measurement method, which is applied in the direction of measuring device, scanning probe microscope, instrument, etc., can solve the problems that have not been reported, achieve the effect of low price, eliminate image distortion, and improve imaging accuracy

Inactive Publication Date: 2014-03-19
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

At present, the AFM vibration measurement method is only for single-axis vibration measurement (such as the Z-axis direction), and there is no report for the measurement of multi-axis coupling (such as the Z-axis direction vibration caused by the X-axis direction movement)

Method used

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  • Micro-nano scale coupling vibration high-resolution measurement method

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] The steps of the inventive method are as follows:

[0027] 1) Set the AFM automatic needle insertion process and the initial state of the probe:

[0028] Such as figure 1 As shown, the stepper motor 3 drives the probe 5 to approach the surface of the sample 6 at a speed of 0.5um / s. When the photodetector 1 detects that the light spot deflection signal emitted from the laser light source 2 reflected from the back of the probe 5 exceeds 100mv , stop the stepper motor 3, and the AFM automatic needle insertion process is completed. In order to prevent the influence of the self-excited oscillation of the probe 5 caused by the separation of the probe 5 due to the inclination of the sample 6 during the vibration measurement process of the probe 5, the photodetector 1 is deflected by adjusting the elongation of the scanner 7 in the Z direction...

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Abstract

A micro-nano scale coupling vibration high-resolution measurement method is provided. The method based on an atomic force microscope (AFM) imaging technology is characterized by, to begin with, enabling a passivated AFM probe to contact with the smooth surface of a sample on a scanner, driving the scanner to drive the sample to perform X-axis-direction reciprocating scanning movement through a high-voltage driver, and utilizing a photoelectric detector to synchronously detect a Z-axis-direction deflection process of the AFM probe, so that micro-nano scale high-resolution measurement of Z-axis-direction coupling vibration of the scanner due to the X-axis-direction movement of the scanner is realized.

Description

technical field [0001] The invention relates to a high-resolution measurement method of micro-nano scale coupling vibration based on atomic force microscope AFM. Background technique [0002] Atomic Force Microscope (AFM) fast scanning technology is a hot research direction with rapid development in recent years (T.Ando, ​​"High-speed atomic force microscopy coming of age", Nanotechnology, 2012, 23:06200-062028.). The improvement of the scan rate can not only reduce the scan time and improve the operating efficiency, but more importantly, it can make up for the lack of real-time observation of the dynamic changes of biological samples due to the slow scan rate (1 second / frame) of ordinary AFM. [0003] As one of the key components of the AFM system, the scanner's fast motion performance plays a decisive role in the AFM imaging effect. At present, the scanners used in AFM fast scanning technology are generally piezoelectric ceramic tubes, piezoelectric ceramic stacks, flexib...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/24
Inventor 殷伯华陈代谢韩立刘俊标林云生初明璋
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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