The invention discloses a wide-range
optical fiber vacuum sensor with multiple steps and a manufacturing method of the wide-range
optical fiber vacuum sensor with the multiple steps. The wide-range
optical fiber vacuum sensor comprises a sensor head, a sensor body, a transmission optical
fiber, a supporting structure of the sensor and an accommodating structure of the transmission optical
fiber. The sensor head is a stepped optical
fiber vacuum sensor head and provided with a dual-layer structure with SiO2
oxide layer steps. The first layer structure is a
monocrystalline silicon wafer, the second layer structure is a Pyrex glass
wafer, a two-level stepped round shallow pit array is arranged on the front surface of the Pyres glass
wafer, the Pyres glass wafer is divided into single sensor units, wherein the surfaces of the sensor units are squares or other polygons, and the round shallow pit array comprises a first round shallow pit step and a second round shallow pit step. The wide-range optical fiber vacuum sensor achieves high precision
pressure measurement in a vacuum region, can survive in a
constant pressure range without other packaging measures, can be used for high precision measurement in the
constant pressure range, can effectively expand the high precision
pressure measurement range of the sensor, and is convenient to manufacture in a massive mode.