Dicing-tape-integrated adhesive sheet, semiconductor device, multilayered circuit board and electronic component
A technology for cutting tapes and adhesive sheets, used in semiconductor devices, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as difficulty in ensuring insulation between adjacent terminals, and difficulty in ensuring reliability of electronic components and semiconductor devices. Excellent workability
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Embodiment 1)
[0199]
[0200] A weight-average molecular weight of 300,000 obtained by copolymerizing 30% by weight of 2-ethylhexyl acrylate and 70% by weight of vinyl acetate was applied to a polyester film with a thickness of 38 μm after mold release treatment so that the thickness after drying became 10 μm. 100 parts by weight of copolymer, 45 parts by weight of pentafunctional acrylate monomer with a molecular weight of 700, 5 parts by weight of 2,2-dimethoxy-2-phenylacetophenone and toluene diisocyanate (CORONATE T-100, Nippon Polyurethane Industry Co., Ltd.) 3 parts by weight, and then dried at 80° C. for 5 minutes. Furthermore, the obtained coating film was irradiated with ultraviolet rays of 500 mJ / cm 2 , forming an interlayer on the polyester film.
[0201]
[0202] A varnish for an adhesive layer of a dicing tape prepared by blending 100 wt. and 3 parts by weight of toluene diisocyanate (CORONATE T-100, manufactured by Nippon Polyurethane Industry Co., Ltd.). The above-ment...
Embodiment 2)
[0227] The dicing tape-integrated adhesive sheet and semiconductor device were produced in the same manner as in Example 1 except that the varnish for an adhesive film was produced as follows.
[0228]
[0229] In the preparation of the varnish for the adhesive film, 20.4 parts by weight of cresol novolac type resin (manufactured by DIC Corporation, KA-1160) was changed to 15.0 parts by weight, and bisphenol F type epoxy resin (manufactured by DIC Corporation, EXA- 830LVP) 56.8 parts by weight was changed to 45.0 parts by weight of bisphenol A epoxy resin (manufactured by DIC Corporation, EPICLON-840S), and 15.0 parts by weight of trimellitic acid (manufactured by Tokyo Chemical Industry Co., Ltd.) was changed to 2,3-naphthalenedi Carboxylic acid (manufactured by Tokyo Chemical Industry Co., Ltd.) 15.0 parts by weight, 7.2 parts by weight of phenoxy resin (manufactured by Mitsubishi Chemical Corporation, YX-6954) was changed to 24.4 parts by weight of urethane acrylate polyme...
Embodiment 3)
[0231] A dicing tape-integrated adhesive sheet and a semiconductor device were produced in the same manner as in Example 1 except that the varnish for the adhesive film was prepared as follows.
[0232]
[0233] In preparing the varnish for the adhesive film, 20.4 parts by weight of cresol novolak-type resin (manufactured by DIC Corporation, KA-1160) was changed to 10.1 parts by weight of biphenylaralkyl-type phenol (manufactured by Meiwa Kasei Co., Ltd., MEH-7851H) In parts by weight, 56.8 parts by weight of bisphenol F-type epoxy resin (manufactured by DIC Corporation, EXA-830LVP) was changed to 31.0 parts by weight, and 15.0 parts by weight of trimellitic acid (manufactured by Tokyo Chemical Industry Co., Ltd.) was changed to phenolphthalein (Tokyo Kasei Kogyo Co., Ltd.) 11.2 parts by weight, 7.2 parts by weight of phenoxy resin (manufactured by Mitsubishi Chemical Corporation, YX-6954) was changed to 14.5 parts by weight of methacrylate polymer (manufactured by Negami Kog...
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Abstract
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