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Experiment device for recycling ammonia in LED (light emitting diode) mixed waste gas by compression refrigeration method and verifying method of experiment device

A technology of freezing method and exhaust gas, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve problems such as delay in recovery plan, failure of investment in recycling exhaust gas, etc., and achieve the effect of improving design accuracy, scientific and real data, and fast experimentation

Inactive Publication Date: 2014-03-26
SUZHOU JINHONG GAS CO LTD
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  • Summary
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  • Description
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AI Technical Summary

Problems solved by technology

However, the scale of (LED) exhaust gas and the composition of various gases are different, requiring detailed scientific software design
However, there will inevitably be deviations between the software design and the actual situation. Once there is a deviation, it will cause investment failure in recycling waste gas and delay the recycling plan.

Method used

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  • Experiment device for recycling ammonia in LED (light emitting diode) mixed waste gas by compression refrigeration method and verifying method of experiment device

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Experimental program
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Embodiment Construction

[0025] This embodiment is an experimental device and verification method for recycling ammonia in LED exhaust gas by compression freezing method, which includes: mixed standard gas cylinder (1), pressure reducing and regulating valve group, pressure gauge (3), low temperature Refrigerant container (4), cryogenic refrigerant (5), screw-type cryogenic tube set (6), gas-liquid separator (7), thermometer (8), gas flow meter (10), pressure regulating valve, gas chromatograph Instrument (13), waste gas neutralization bucket (16).

[0026] like figure 1 As shown, the mixed standard gas cylinder (1) is configured by mixing nitrogen, hydrogen, and ammonia in proportion to replace the compressed high-pressure gas cylinder used in the experiment, with a maximum pressure of 20MPa. The pressure valve group I (2) is connected, the pressure reducing and regulating valve group I (2) is connected with the screw-type freezing tube group (6), the screw-type freezing tube group (6) is connected ...

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Abstract

The invention discloses an experiment device for recycling ammonia in LED (light emitting diode) mixed waste gas by a compression refrigeration method and a verifying method of the experiment device. The verifying method is mainly used for verifying that GaN is deposited by the ammonia and a trimethyl gallium gas phase of a semiconductor light emitting diode (LED); the mixed gas of ammonia, nitrogen and hydrogen is discharged in a production process, and a little of ammonia in the mixed gas is recycled by the compression refrigeration method technology; the correctness of chemically technical software measurement during technical design is verified; the possible deflection in a design and actual implementation process is prevented; the design precision is improved; the investment loss is reduced.

Description

technical field [0001] The invention relates to the technical field of waste gas treatment in LED production, in particular to a method for verifying that GaN is vapor-phase-deposited in ammonia gas and trimethylgallium in semiconductor light-emitting diodes (LEDs for short), and the mixture of ammonia gas, nitrogen gas and hydrogen gas is discharged during the production process. For gas, a small amount of ammonia in the mixed gas is recovered by the compression refrigeration method, and the correctness of the calculation of the chemical process software is verified during the process design process, so as to prevent possible deviations between the design and the actual implementation process, improve design accuracy, and reduce investment losses. Methods. Background technique [0002] Ultra-pure ammonia is the main raw material required for light-emitting diodes (LEDs), flat panel displays (FPDs), semiconductors and crystalline silicon solar cells (the four major industrie...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N30/02
Inventor 金向华李荷庆
Owner SUZHOU JINHONG GAS CO LTD
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