Two-dimensional microscale measuring device and method based on three-core fiber bragg grating

Abstract

The invention belongs to the technical field of precision instrument manufacture and measurement and provides a two-dimensional microscale measuring device and method based on a three-core fiber bragg grating. The device comprises a wideband light source, a spectrum analyzer, an optical circulator, a control computer, a multiplex photoswitch and an external reference grating. The multiplex photoswitch is communicated with a three-core optical fiber fan-out device through three single mode optical fibers respectively. One end of the three-core optical fiber is connected to the three-core optical fiber fan-out device, a three-core fiber bragg grating probe is fixedly arranged at the other end of a three-core fiber through a probe clamping device, and the three-core fiber and the three-core fiber bragg grating probe are connected to form a channel. The method comprises the following steps that the control computer controls the multipath photoswitch to switch optical paths, the spectrum analyzer is utilized to respectively measure reflectance spectrums of the fiber bragg grating, and two-dimensional microscale measurement of non-temperature coupling is achieved by utilizing the differential data processing algorithm. The two-dimensional microscale measuring device has the advantages of being high in precision, small in contact force and not influenced by the shadowing effect. In addition, the service life of the probe is long.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and measurement, and in particular relates to a two-dimensional micro-scale measurement device and method based on a three-core optical fiber grating. Background technique [0002] With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision and tiny components has increased dramatically. Due to the limitations of the space scale and the shadowing effect of the micro-components to be measured, as well as the influence of the measurement contact force, it is difficult to realize the precise measurement of the micro-component scale, especially the measurement of the depth of the micro-cavity components is difficult to increase, which has become a constraint to the development of the industry. "bottleneck". In order to achieve smaller size measurement and increase the measurement ...

AI Technical Summary

Problems solved by technology

[0009] 1. It is difficult to further improve the touch displacement resolution of the detection system

The primary magnification of the existing detection system is low, resulting in a low overall magnification, and it is difficult to further improve the resolution of the touch displacement.

The fiber grating probe based on FBG Bending's micropore size measurement method cannot apply the main micro-touch displacement effect to the fiber grating, and the sensing signal converted into spectral information is weak, and the resolution of the system is very low

[0010] 2. The real-time performance of the detection system is poor, and it is difficult to achieve precise online measurement

The probe of the micropore size measurement method based on FBG Bending has the same performance in all directions, and there is coupling in the radial two-dimensional touch displacement sensing, and it cannot be separated, resulting in a large error in the two-dimensional measurement, and the radial two-dimensional measurement cannot be realized. Accurate measurement of dimensional contact displacement

[0012] 4. Does not have the decoupling capability of radial and axial detection

The detection methods mentioned above either do not have the ability of axial detection or the decoupling ability of radial and axial detection. When performing micro-scale measurement, the measurement steps are complicated and the measurement efficiency is low.

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