Substrate pretreatment equipment

Abstract

The invention provides a substrate preprocessing equipment, which includes a substrate preprocessing chamber and an automatic control system. In the substrate pretreatment equipment provided by the present invention, each module such as the vacuum system control module, gas flow control module, power control module, substrate platform control module, and transfer and handover module collects various parameter signals in the substrate pretreatment room, And send each parameter signal to the control switchboard. The control switchboard processes the received parameter signals according to the preset parameters to obtain a feedback signal, and feeds the feedback signal back to the corresponding control module. The corresponding The control module then automatically regulates corresponding components, such as vacuum equipment, air inlet devices, substrate platforms, etc., based on corresponding feedback signals to achieve automatic control of substrate preprocessing, which not only saves a lot of manpower, but more importantly, can Realize effective monitoring of the substrate pretreatment process, thereby improving the accuracy, quality and speed of substrate pretreatment.

Description

Technical field [0001] The invention belongs to the technical field of vacuum evaporation, and particularly relates to a substrate pretreatment device. Background technique [0002] In the past decade, organic optoelectronic devices such as organic light-emitting diodes, organic solar cells, and organic thin-film transistors have received extensive attention from academia and business circles. Through the continuous efforts of scientific researchers, the related technology of organic optoelectronic devices has been developed by leaps and bounds, and the organic optoelectronic device industry is rapidly taking shape and continues to mature and grow. At the same time, the demand for high-performance and high-quality organic optoelectronic devices in the international and domestic markets is increasing day by day. What is gratifying is that my country's basic research in the field of organic optoelectronic devices is very solid, and the concepts of material synthesis and device des...

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