Substrate pretreatment equipment

Abstract

The invention provides a substrate preprocessing device. The substrate preprocessing device comprises a substrate preprocessing room and an automatic control system. In the substrate preprocessing device, a vacuum system control module, a gas flow control module, a power supply control module, a substrate platform control module, a conveying and connection choosing module and other modules collect all parameter signals in the substrate preprocessing room and send the parameter signals to a control master machine; the control master machine processes the received parameter signals according to preset parameters to acquire feedback signals and sends the feedback signals to the corresponding control modules, and the corresponding control modules automatically adjust and control corresponding components like vacuumizing equipment, air inlet devices and substrate platforms according to the corresponding feedback signals so as to achieve automatic control over substrate preprocessing. A large amount of manpower is saved, it is more important that the substrate preprocessing process can be effectively monitored, and therefore substrate preprocessing precision, quality and speed can be improved.

Description

Technical field [0001] The invention belongs to the technical field of vacuum evaporation, and particularly relates to a substrate pretreatment device. Background technique [0002] In the past decade, organic optoelectronic devices such as organic light-emitting diodes, organic solar cells, and organic thin-film transistors have received extensive attention from academia and business circles. Through the continuous efforts of scientific researchers, the related technology of organic optoelectronic devices has been developed by leaps and bounds, and the organic optoelectronic device industry is rapidly taking shape and continues to mature and grow. At the same time, the demand for high-performance and high-quality organic optoelectronic devices in the international and domestic markets is increasing day by day. What is gratifying is that my country's basic research in the field of organic optoelectronic devices is very solid, and the concepts of material synthesis and device des...

AI Technical Summary

Problems solved by technology

At present, the domestic substrate pretreatment equipment lacks effective monitoring and automatic control of the substrate pretreatment process, and needs to rely on the experience and feeling of technicians in the specific operation process, resulting in low precision and loss Serious; at the same time, due to the inability to automatically control the substrate pretreatment process, there are great differences in the performance of different batches of devices

In addition, due to the lack of sophisticated docking and transfer technology, the substrate pretreatment process is very slow and cannot be mass-produced, and cannot meet the growing needs of industrialization

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