Substrate pretreatment equipment

Abstract

The invention provides a substrate preprocessing equipment, which includes a substrate preprocessing chamber and an automatic control system. In the substrate pretreatment equipment provided by the present invention, each module such as the vacuum system control module, gas flow control module, power control module, substrate platform control module, and transfer and handover module collects various parameter signals in the substrate pretreatment room, And send each parameter signal to the control switchboard. The control switchboard processes the received parameter signals according to the preset parameters to obtain a feedback signal, and feeds the feedback signal back to the corresponding control module. The corresponding The control module then automatically regulates corresponding components, such as vacuum equipment, air inlet devices, substrate platforms, etc., based on corresponding feedback signals to achieve automatic control of substrate preprocessing, which not only saves a lot of manpower, but more importantly, can Realize effective monitoring of the substrate pretreatment process, thereby improving the accuracy, quality and speed of substrate pretreatment.

Description

Technical field [0001] The invention belongs to the technical field of vacuum evaporation, and particularly relates to a substrate pretreatment device. Background technique [0002] In the past decade, organic optoelectronic devices such as organic light-emitting diodes, organic solar cells, and organic thin-film transistors have received extensive attention from academia and business circles. Through the continuous efforts of scientific researchers, the related technology of organic optoelectronic devices has been developed by leaps and bounds, and the organic optoelectronic device industry is rapidly taking shape and continues to mature and grow. At the same time, the demand for high-performance and high-quality organic optoelectronic devices in the international and domestic markets is increasing day by day. What is gratifying is that my country's basic research in the field of organic optoelectronic devices is very solid, and the concepts of material synthesis and device des...

AI Technical Summary

Problems solved by technology

At present, the domestic substrate pretreatment equipment lacks effective monitoring and automatic control of the substrate pretreatment process, and needs to rely on the experience and feeling of technicians in the specific operation process, resulting in low precision and loss Serious; at the same time, due to the inability to automatically control the substrate pretreatment process, there are great differences in the performance of different batches of devices

In addition, due to the lack of sophisticated docking and transfer technology, the substrate pretreatment process is very slow and cannot be mass-produced, and cannot meet the growing needs of industrialization

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