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The production process of hexafluoroethane

A technology of hexafluoroethane and production process, applied in the field of production process of hydrofluorocarbons, can solve the problems of increased equipment investment, complex process flow and the like

Active Publication Date: 2016-02-10
SINOCHEM LANTIAN +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This often complicates the process and increases equipment investment.

Method used

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  • The production process of hexafluoroethane

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Embodiment 1

[0032] A nickel-based alloy tube with an inner diameter of 25 mm is filled with 60 ml of chromium-based catalyst. Introduce hydrogen fluoride for fluorination for 16h. Pentafluorochloroethane and hydrogen fluoride are then introduced into the reactor. The reaction conditions are: the molar ratio of hydrogen fluoride to pentafluorochloroethane is 3, the reaction temperature is 380°C, the contact time is 50s, and the reaction pressure is 0.1MPa. See Table 1 for the R115 conversion and R116 selectivity obtained at reaction temperatures of 390°C, 400°C, 410°C, and 450°C. The reaction material (6) is separated through a separation tower (2), the bottom of the tower is a material flow (8) mainly containing hydrogen fluoride, and the top of the tower is a material flow (7) mainly containing hexafluoroethane and hydrochlorofluorocarbons, At a pressure of 0.3 MPa, the analytical composition obtained at the top of the tower is shown in Table 2.

[0033]After being compressed, the ove...

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Abstract

The invention discloses a production process of hexafluoroethane, through two-stage separation and purification, the purity of the hexafluoroethane product can reach more than 99.99%. The production process provided by the invention simplifies the conventional process flow, saves equipment investment, makes the reaction stable and improves the production efficiency.

Description

technical field [0001] The invention relates to a production process of hydrofluorocarbons, in particular to a process for producing hexafluoroethane. Background technique [0002] Hexafluoroethane can be used as a cleaning or etching gas for semiconductors. For its preparation method, report has following several kinds at present: [0003] (1) Anhydrous hydrogen fluoride in the presence of a fluorination catalyst to fluorinate hydrochlorofluorocarbons such as dichlorotetrafluoroethane or chloropentafluoroethane; [0004] (2) Direct fluorination of tetrafluoroethane and / or pentafluoroethane with fluorine gas. [0005] When the method (1) is adopted, since the sources of hydrochlorofluorocarbons in each process are different, the organic impurities brought in from the raw materials are different. To obtain higher purity hexafluoroethane, the raw material must be purified. The raw material purification process includes simple distillation, rectification, and adsorption of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C07C19/08C07C17/20
Inventor 柴华杨会娥李峰李忠陈蜀康张文庆王刚
Owner SINOCHEM LANTIAN