A flat-plate collecting device and measuring method for measuring secondary electron emission coefficient
A secondary electron emission and collection device technology, which is applied in the direction of material analysis by measuring secondary emissions, can solve problems such as measurement difficulties, and achieve the effects of saving time for changing samples, convenient and intuitive adjustment, and improving efficiency
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[0036] The present invention will be further described in detail below in conjunction with specific examples, which are explanations of the present invention rather than limitations.
[0037] see figure 1 , a flat-plate collection device for measuring the secondary electron emission coefficient, including a sample stage 4 and a collector 2 arranged in parallel in a vacuum chamber 9, a beam spot aperture 3 is opened on the collector 2, and the electron gun 1 emits a beam passing through The electron beam of spot pinhole 3; The lower end of sample stage 4 is provided with the rotating platform 7 that is connected with rotating shaft 8, is provided with a plurality of sample placement positions on sample stage 4, and Faraday cage 6 is arranged on rotating platform 7, and sample stage The sample placement position of 4 and the Faraday cage 6 are alternately located under the beam spot aperture 3 through the rotation of the rotating platform 7; the collector 2 and the Faraday cage ...
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