Preparation method for tin oxide nanowire gas sensor

Abstract

A preparation method for a tin oxide nanowire gas sensor is disclosed. The preparation method comprises: deposing a silicon oxide insulating layer on a monocrystalline silicon substrate, and coating the insulating layer with a layer of a photoresist; peeling off corresponding photoresist by performing contact exposure on an interdigital cross electrode mold plate and the photoresist; sputtering a layer of chromium membrane on the surface of the silicon oxide insulating layer, then sputtering a layer of gold membrane on the chromium membrane, then putting the whole substrate in alcohol to peel off unexposed photoresist and form a chromium-gold interdigital cross electrode; and putting active carbon and tin stannic oxide powder in a small quartz tube, then putting the substrate with the chromium-gold interdigital cross electrode at a position being 1 cm distant from the mixed powder, putting the small quartz tube in a large quartz tube, placing in a vacuum furnace, performing vacuum pumping, then introducing nitrogen, heating, and cooling, wherein an offwhite flocculent substance attaching to the substrate with the chromium-gold interdigital cross electrode is stannic oxide nanowire, and the stannic oxide nanowire attaches to the substrate with the chromium-gold interdigital cross electrode for forming the stannic oxide nanowire gas sensor.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to a preparation method of a tin oxide nanowire gas sensor. Background technique [0002] A gas sensor is a converter that converts a certain gas volume fraction into a corresponding electrical signal. The probe head conditions the gas sample through the gas sensor, usually including filtering out impurities and interfering gases, drying or cooling the display part of the instrument. [0003] The sensitivity and stability of materials used in traditional gas sensors are relatively poor. Nanomaterials have become the mainstream, especially gas sensors with metal oxide nanostructures, which have low power consumption, simple preparation, and can perfectly match semiconductor materials. However, the current metal oxide nanowire gas sensors are still prepared in a non-self-assembled manner, and the gas-sensing properties of the prepared sensors need to be improved. Contents of th...

AI Technical Summary

Problems solved by technology

[0003] The sensitivity and stability of materials used in traditional gas sensors are relatively poor. Nanomaterials have become the mainstream, especially gas sensors with metal oxide nanostructures, which have low power consumption, simple preparation, and can perfectly match semiconductor materials. However, the current metal oxide nanowire gas sensors are still prepared in a non-self-assembled manner, and the gas-sensing properties of the prepared sensors need to be improved.