Gas sensitization array sensor and its manufacture method

An array sensor and gas-sensitive technology, applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of expensive production equipment, harsh production conditions, poor mechanical stability of devices, etc., and meet the requirements of mass production and production environment The effect of low and good gas sensitivity stability

Inactive Publication Date: 2008-03-26
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

Application of micro-electromechanical systems (MEMS) processing technology (Kraig D. Mitzner, Jason Sternhagen, David W. Galipeau, Development of a micromachined hazardous gas sensor array, Sensors and Actuators B 93 (2003) 92-99), to monocrystalline silicon wafer As the substrate, the gas-sensitive array sensor prepared by standard microelectronics manufacturing and post-processing technology, although the gas sensor and its array with low power consumption can be prepared, the stability and consistency of the sensor and its array are still this Achilles' heel of craftsmanship
Moreover, this technology is also difficult to meet the requirements of different chemical compositions for each element in the sensor array
At the same time, the production equipment for MEMS processing is very expensive and the production conditions are harsh
And the encapsulation of the array substrate prepared by the thick film technology or adopts to mount on the base, or adopts the suspended type (I.Czech, J.Manca, J.Roggen et al.ElectricalCharacterization and Reliability Studies of Thick Film Gas Sensor Structures.Proceedings of the 1996 IEEE International Conference on Microelectronic TestStructures, Vol.9, March 1996), the former heats up the array substrate and the base together, which consumes a lot of energy, while the latter has weak support strength of the electrode leads and the mechanical stability of the device bad sex
These factors have seriously hindered the widespread use of sensor arrays

Method used

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  • Gas sensitization array sensor and its manufacture method
  • Gas sensitization array sensor and its manufacture method
  • Gas sensitization array sensor and its manufacture method

Examples

Experimental program
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Effect test

Embodiment 1

[0039] (1) Preparation of a substrate with electrodes and heaters. With 0.4mm thick Al 2 o 3 The ceramic is the substrate 3, and the positive electrode 7 of the array heater, the first, second, third, and fourth test electrodes 9, 11, 12, 13 and their return electrodes 10, The slurry film of the common electrode composed of 14 and 15. After drying, it was sintered at 900°C for 10 minutes in the air, and then slowly cooled to room temperature with the furnace to obtain a substrate with electrodes as shown in Figure 2. After screen-printing RuO using the screen shown in Figure 3(b) 2 After the slurry film is dried, it is sintered in the air at 850° C. for 15 minutes, and slowly cooled to room temperature with the furnace to obtain a substrate with electrodes and a heater as shown in FIG. 3( a ).

[0040] (2) Preparation of the sensitive layer 8 of the gas array. With tetrapod nano-ZnO, 10wt%TiO 2 Doped tetraacicular nano-ZnO, 5wt% Co 2 o 3 Doped tetraacicular nano-ZnO, 1...

Embodiment 2

[0044] A six-unit gas sensor array can be obtained by adding one test electrode between the 9th and 11th test electrodes and between the 12th and 13th test electrodes of the four-unit array in the first embodiment. The preparation steps are the same as those in Example 1, the gas sensor array substrate, heating film, electrode and sensitive layer materials, and the sintering process are shown in Table 1. Six-element gas sensor arrays with different gas sensitivity characteristics are available.

[0045] Table 1: Six-element gas sensor array substrate, heating film, electrode and sensitive layer materials, sintering process

[0046] Array substrate: aluminum nitride

[0047] The present invention is not limited to the above-mentioned embodiments, by adding different numbers of test electrodes between the first and second test electrodes, and between the third and fourth test electrodes, and printing a heating film and a metal oxide sensitive layer, it can be obtaine...

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Abstract

The invention discloses a kind of array sensor for gas and the preparing method. The sensor uses the aurum, platinum or argentum as electrode; the RuO2, MoSi2, W or Pt is as heating membrane material; the random one or several kinds of the ZnO, SnO2 or Fe2O, or ZnO, SnO2 or Fe2O3 and Pt0.1wt%-3wt%, Pd0.1wt%-3wt%, Ni1wt%-30wt%, TiO21wt%-30wt%, WO31wt%-40wt%, Co2O3 1wt%-15wt%, V2O51wt%-30wt%, Al2O31wt%-20wt%, MnO21wt%-30wt% is as the sensing layer material. It gets the gas sensing array on the alumina, aluminium nitride or silicon base sheet with anti high temperature, electric insulating and heat conducting by the screen printing technology. The gas sensing array is fixed on the basal seat by the axis to form the gas sensing array sensor by ultrasonic hot press welding electrode leg wire. The sensor has the low production cost, low power cost, good mechanism stability. Each unit has the good gas sensing character and the process is proper for the big batch production.

Description

technical field [0001] The invention belongs to the technical field of gas-sensitive array sensors, and in particular relates to a gas-sensitive array sensor and a preparation method thereof. Background technique [0002] Gas sensors have been widely used in environmental monitoring, fire alarm, chemical industry, and food processing industry. Among various gas sensors, metal oxide sensors have attracted attention due to their simple structure and low price. Sensitive materials (SnO 2 , ZnO, Fe 2 o 3 etc.) need to work at a temperature of 300-400°C. Devices manufactured with traditional technologies consume a lot of power and are large in size. A single sensor can only provide a simple alarm for gas. Application of micro-electromechanical systems (MEMS) processing technology (Kraig D. Mitzner, Jason Sternhagen, David W. Galipeau, Development of a micromachined hazardous gas sensor array, Sensors and Actuators B 93 (2003) 92-99), to monocrystalline silicon wafer As the su...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/407G01N27/12
Inventor 谢长生柏自奎胡木林张顺平曾大文
Owner HUAZHONG UNIV OF SCI & TECH
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