Diluting and discharging valve of highly corrosive high temperature chemical liquids
A high-temperature chemical and corrosive technology, applied in the direction of valve operation/release devices, valve details, multi-way valves, etc., can solve problems such as long cooling time, reduced production efficiency, and delayed production time, achieving short exile time and structural simple effect
Active Publication Date: 2014-05-21
THE 45TH RES INST OF CETC
View PDF7 Cites 6 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Since the quartz heating cylinder is equipped with an insulating layer, it takes six to seven hours for the waste liquid to cool naturally from 210 °C to below 50 °C in the quartz tank, which takes a long time to cool down, delays production time, and seriously reduces production efficiency; in addition, whether it is used Pneumatic diaphragm pump or siphon pump absorbs waste liquid. On the one hand, the waste liquid in the quartz cylinder cannot be sucked and removed cleanly, and waste liquid remains; on the other hand, it is necessary to manually put the suction pipe into the quartz cylinder. risk of personal injury
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0017] like figure 1 , figure 2 , image 3 , Figure 4 As shown, the dilution discharge valve for highly corrosive high-temperature chemical liquid of the present invention includes a replacement valve body 1 and a pneumatic valve body 5 . The replacement valve body 1 and valve core 2 are made of PTFE material. Pneumatic valve body 5, valve cover 12 are made of PVC material. The replacement valve body 1 is a square. The replacement valve body 1 is longitudinally provided with three bolt insertion holes. The longitudinal center of the replacement valve body 1 is provided with a replacement hole composed of three-step holes whose diameter increases from left to right. The pneumatic valve body 5 is a cylinder, and the left end of the pneumatic valve body 5 has three threaded holes corresponding to the bolt insertion holes of the replacement valve body 1. The center of the pneumatic valve body 5 is provided with a diameter decreasing from right to left. Small vias consisting...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
A diluting and discharging valve of highly corrosive high temperature chemical liquids comprises three parts which are a pneumatic valve body, a displacement valve body and a valve core. The displacement valve body is provided with a waste liquid inlet, a cooling water inlet and a waste liquid diluting and discharging port. A compressed air inlet and a compressed air outlet are arranged on the pneumatic valve body. The valve core is located in the valve body and the opening or closing of a valve is controlled by compressed air. The diluting and discharging valve of the highly corrosive high temperature chemical liquids is connected to the bottom of a quartz cylinder with highly corrosive high temperature chemical waste liquids, after the strong acid waste liquids are cooled and diluted in the displacement valve body through the opening of the calve core, and are directly discharged into a waste liquid recovery pipe of a plant through the diluting and discharging valve of the highly corrosive high temperature chemical liquids. The diluting and discharging valve of the highly corrosive high temperature chemical liquids has the advantages of being simple in structure, capable of avoiding strong acid damage accidents, capable of directly flowing and discharging the highly corrosive high temperature chemical waste liquids in the quartz cylinder, short in flowing and discharging time, free of raffinate, and solving the problem that the used high temperature waste liquids are directly discharged into a factory affair acid processing system.
Description
technical field [0001] The invention relates to a discharge valve for corrosive liquid, in particular to a dilution discharge valve for highly corrosive high-temperature chemical liquid used in wet cleaning equipment in the field of semiconductor and LED chip manufacturing. Background technique [0002] With the continuous development of semiconductor and LED chip manufacturing technology, high temperature and strong corrosive chemical liquids are widely used in wet cleaning equipment for chip corrosion and cleaning. These chemical liquids used to corrode semiconductors and LED chips are generally high-concentration strong acids (98% concentrated sulfuric acid) heated in a quartz cylinder to a working temperature above 210°C. The problem that needs to be solved in the production line of these high-temperature and high-concentration strong acids is how to discharge the high-temperature waste liquid after use into the factory acid treatment system through pipes and valves. At...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): F16K11/04F16K31/122
CPCF16K11/04F16K27/0263F16K31/1221
Inventor 祝福生赵永进姚立新张伟锋张乾
Owner THE 45TH RES INST OF CETC