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Internet of Things RF Transceiver Component Cantilever Fishbone Beam Vibration Electromagnetic Self-Powered Microsensor

A radio frequency transceiver, micro sensor technology, applied in piezoelectric devices/electrostrictive devices, generators/motors, microstructure devices composed of deformable elements, etc. Solve the problem of self-power supply, improve electromagnetic compatibility, and suppress the effect of jitter

Inactive Publication Date: 2015-11-18
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although the current microelectronic products of various sensors have made great progress in small size and low energy consumption, the development of corresponding micro energy technology is relatively lagging behind.

Method used

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  • Internet of Things RF Transceiver Component Cantilever Fishbone Beam Vibration Electromagnetic Self-Powered Microsensor
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  • Internet of Things RF Transceiver Component Cantilever Fishbone Beam Vibration Electromagnetic Self-Powered Microsensor

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Embodiment Construction

[0015] The specific implementation scheme of the cantilever fishbone beam vibration / electromagnetic self-powered microsensor of the radio frequency transceiver component of the Internet of Things invented in this paper is as follows:

[0016] With gallium arsenide (GaAs) as the substrate, a rectifier circuit 11 , a first large capacitor 12 , a second large capacitor 13 , and a first voltage stabilizing circuit 14 and a second voltage stabilizing circuit 15 are supplemented on the periphery. The anchor region 2 of the main cantilever beam 3 is fabricated on the gallium arsenide substrate 1, and three pairs of cantilever beams 4 are symmetrically made perpendicular to the edge direction on the free edges on both sides of the upper surface of the main cantilever beam 3. These three pairs of fishbone cantilever beams The beams 4 are equally spaced, and are sequentially arranged from long to short along the direction of the main cantilever beam 3. The anchorage areas of the main can...

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Abstract

The invention discloses a cantilever fishbone beam vibrating electromagnetic self-powered microsensor of a radio frequency transceiving component of an internet of things. The cantilever fishbone beam vibrating electromagnetic self-powered microsensor is characterized in that a gallium arsenide substrate (1) serves as the substrate, silicon nitride (2) of an anchoring area on the root portion of one end of a main cantilever beam (3) is fixed on the gallium arsenide substrate (1) respectively, three pairs of cantilever beams (4) different in length are arranged at free edges of two sides of the main cantilever beam (3), and a rectifying circuit (11), a first large capacitor (12), a second large capacitor (13), a first voltage stabilizing circuit (14) and a second voltage stabilizing circuit (15) are arranged around the cantilever fishbone beam vibrating electromagnetic self-powered microsensor. The problem about self-powering of low-power apparatuses in the radio frequency transceiving component is solved, vibrating energy collection in a wide band range can be achieved, efficiency of the self-powered microsensor is improved, and shaking of a system structure is restrained. Furthermore, electromagnetic compatibility of the radio frequency transceiving component is improved, and efficiency of the self-powered microsensor is improved since the efficiency of electromagnetic energy collection is improved via vibrating.

Description

technical field [0001] The invention proposes a cantilever fishbone beam vibration / electromagnetic self-powered microsensor of a radio frequency transceiver component of the Internet of Things, which belongs to the technical field of radio frequency microelectromechanical systems (RFMEMS). Background technique [0002] With the rapid development of the Internet of Things, micro mechanical systems (MEMS) and wireless sensor networks and other fields, while bringing convenience to people's lives, they also continue to pose challenges. Although the current microelectronic products of various sensors have made great progress in small size and low energy consumption, the development of corresponding micro energy technology is relatively lagging behind. Based on the principle of energy harvesting self-power supply technology, self-powered micro-sensors can easily obtain various energies from the surrounding environmental energy, including solar energy, mechanical vibration energy,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/02B81B3/00H02N2/18
Inventor 廖小平吴昊
Owner SOUTHEAST UNIV
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