A kind of Invar alloy for large-scale integrated circuit manufacturing equipment and preparation method thereof

A large-scale integrated circuit and invar technology, which is applied in the field of alloys and their preparation, can solve the problems that the production and use requirements of large-scale integrated circuit manufacturing equipment cannot be met, the processing and manufacturing process is complicated, and the cost of alloy elements is high, and the comprehensive performance can be maintained. , less alloying elements, cost-saving effect

Active Publication Date: 2015-12-02
SHENYANG FORTUNE PRECISION EQUIP CO LTD
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Problems solved by technology

[0010] The invention provides an Invar alloy suitable for large-scale integrated circuit manufacturing equipment and its preparation method to solve the problem that the conventional iron-nickel Invar alloy has low tensile strength and cannot meet the production and use requirements of large-scale integrated circuit manufacturing equipment, and To ensure that when the strength of the alloy is increased, there will be no technical problems such as an obvious increase in the expansion coefficient of the alloy, high cost of adding more expensive alloy elements, complex processing and manufacturing processes, and significant deterioration of the alloy shape

Method used

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  • A kind of Invar alloy for large-scale integrated circuit manufacturing equipment and preparation method thereof
  • A kind of Invar alloy for large-scale integrated circuit manufacturing equipment and preparation method thereof

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specific Embodiment approach 1

[0037] Specific embodiment 1: In this embodiment, a method for preparing Invar alloy for large-scale integrated circuit manufacturing equipment is carried out according to the following steps: 1. The raw materials are distributed by mass, and the mass of electrolytic nickel accounts for 34.0-38.0 of the total mass of raw materials. %, the quality of sponge titanium accounts for 0.01% to 0.5% of the total mass of raw materials, the balance is electrolytic iron, and the mass of C element contained in it accounts for 0.001% to 0.1% of the total mass of raw materials; 2. The temperature is 1520-1580℃ and vacuum Degree is 0.5×10 -2 ~5×10 -2 Invar alloy is smelted by vacuum arc under Pa conditions, and the holding time is 5~30min to obtain the melt; adjust the temperature to 1450~1520℃, and then cast into ingot; 3. Heat the ingot to 1000~1200℃, Pressure processing to obtain products; 4. Heat treatment of the obtained products, heat to 800~900℃ for 0.5~3h, quickly cool to room temperat...

specific Embodiment approach 2

[0038] Embodiment 2: The only difference between this embodiment and the specific embodiment is that in step 1, the quality of electrolytic nickel accounts for 35.5 to 36.5% of the total mass of raw materials.

specific Embodiment approach 3

[0039] Specific embodiment three: this embodiment is different from specific embodiment one or two in that in step one, the mass of sponge titanium accounts for 0.05% of the total mass of raw materials.

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Abstract

The invention relates to an invar alloy for large scale integrated circuit manufacturing equipment and a preparation method of the invar alloy. The technical scheme adopted by the invention is that an existing conventional Fe-Ni invar alloy comprises Ni, Fe and allowable impurities, wherein the allowable impurities comprise C, the mass fraction of Ni is 34.0%-38.0%, the mass fraction of C is 0.001%-0.1%, and the balance is Fe; the invar alloy for large scale integrated circuit manufacturing equipment is characterized in that Ti is added on the basis of keeping the constituents of the conventional Fe-Ni invar alloy, and the mass fraction of Ti is 0.01%-0.5%; Ti reacts with C to generate a strengthening phase TiC in situ. The invar alloy and the preparation method solve the problems that the conventional Fe-Ni invar alloy is relatively low in tensile strength, and cannot meet the production and use requirements of the large scale integrated circuit manufacturing equipment.

Description

Technical field [0001] The invention relates to an alloy and a preparation method thereof, in particular to an invar alloy and a preparation method thereof, in particular to an invar alloy for large-scale integrated circuit manufacturing equipment and a preparation method thereof. Background technique [0002] Conventional iron-nickel invar alloy is a metal material with a nickel content of about 36%, such as 4J36. Below the Curie temperature, the alloy has a very low expansion coefficient. Due to this characteristic of conventional iron-nickel invar alloy, it has become one of the commonly used materials for manufacturing precision instruments and equipment. In order to ensure the accuracy, stability and reliability of the performance of large-scale integrated circuit products, large-scale integrated circuit manufacturing equipment should also be designed and manufactured with dimensionally stable Invar alloy materials. Although the expansion performance of conventional iron-n...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22C38/14C22C33/04
Inventor 路东柱吴敏杰郑广文
Owner SHENYANG FORTUNE PRECISION EQUIP CO LTD
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