Micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling

Abstract

The invention provides a micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling and belongs to the precision instrument manufacture and measurement technology. The sensor comprises a laser device a, a laser device b, a beam expanding collimating lens a, a beam expanding collimating lens b, an optical fiber coupling lens a, an optical fiber coupling lens b, a conduit, a microscope objective, a CCD camera, a computer and a probe composed of an incidence optical fiber a, an incident optical fiber b, a coupler and an emergent optical fiber. The incident optical fiber a adheres to the incident optical fiber b in the lateral direction through glue. The coupler serves as a contact point of the probe. Two lasers emitted by the laser device a and the laser device b are incoherent lasers, enter the incidence optical fiber a and the incidence optical fiber b and are guided into the coupler and then guided out through the emergent optical fiber. The guided lasers enter the CCD camera through the microscope objective. The position of a light spot energy center formed on the CCD camera by the emitted lasers can be obtained through the image processing technology so that the collimation condition of the sensor in a space can be judged. The sensor is good in directivity, high in anti-jamming capacity and high in definition.

Description

technical field [0001] The invention belongs to precision instrument manufacturing and measurement technology, in particular to a micro-measurement force aiming sensor based on double-incident optical fiber co-spherical coupling. Background technique [0002] With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision and tiny components has increased dramatically. Due to the limitation of the space scale and the shadowing effect of the tiny components to be measured, as well as the influence of the measurement contact force, the precise measurement of the size of the tiny components has become difficult to achieve, especially the measurement depth of the tiny inner cavity components is difficult to increase, which has become a constraint for the development of the industry. "bottleneck". In order to achieve smaller size measurement and increase the measurement depth, the most wid...

AI Technical Summary

Problems solved by technology

The low-light bead scattering imaging method of PTB in Germany is affected by the shadowing effect, which makes it difficult to improve the measurement depth and reduce the detection accuracy of the system

[0011] 2. It is difficult to further improve the displacement resolution of the detection system

The primary magnification of the existing detection system is low, resulting in a low overall magnification, and it is difficult to further improve its displacement resolution

The optical path magnification of the optical measuring rod used in the detection method adopted by the National Institute of Standards and Technology is only 35 times, and the low primary magnification makes it difficult to further improve the displacement resolution.

[0012] 3. The real-time performance of the detection system is poor, and it is difficult to achieve precise online measurement

The detection method adopted by the National Institute of Standards and Technology must use two-way area array CCDs to receive signal images, and a more complex image algorithm must be used to achieve high-resolution monitoring of the displacement of the optical fiber measuring rod, which leads to a large amount of data that the measurement system needs to process. increase and reduce the real-time performance of the detection system, it is difficult to realize the synchronization of the small inner cavity size and the synchronization of the aiming signal and the start and stop measurement in the process of two-dimensional coordinate measurement

[0013] 4. There is coupling of two-dimensional displacement sensing, resulting in insufficient detection capability of two-dimensional displacement direction

The micro-focus alignment measurement method based on single fiber probe measuring rod proposed by Harbin Institute of Technology has coupling in two-dimensional displacement sensing. When the measured displacement is a two-dimensional position, there is a correlation between the two-dimensional information obtained by this method. property, and cannot be separated, resulting in large errors in two-dimensional measurement, unable to achieve accurate measurement of two-dimensional displacement

[0014] 5. The energy of the outgoing beam is low and the signal-to-noise ratio is low

In the probe structure based on dual-fiber coupling proposed by Harbin Institute of Technology, due to the low efficiency of the coupling sphere, the energy of the beam emitted from the exit fiber is low, and it is easily interfered by external stray light, and there is interference of coherent light in the coupling sphere, resulting in the obtained The signal-to-noise ratio is low, and it is difficult to further improve the measurement accuracy

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