Silicon-based thermoelectric and photoelectric sensors in self-powered RF transceiver components
A photoelectric sensor, radio frequency transceiver technology, applied in electrical components, electrical solid state devices, instruments, etc., to achieve the effect of small size, enhanced heat dissipation performance, and reduced power consumption
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[0014] The silicon-based thermoelectric and photoelectric sensor in the self-powered radio frequency transceiver assembly of the present invention is composed of a plurality of sensors 1 , and the sensor 1 is formed by connecting a plurality of thermocouples through metal wires 10 in series. While the thermocouple main part is N + The semiconductor arm 3 of polysilicon and the metal arm 2 of Al are constituted. N + The polysilicon semiconductor arm 3 makes ohmic contact with the Al metal arm 2 . The ohmic contact near the heat sink plate 8 serves as the cold end 4 of the thermocouple, and the one near the heat conducting plate 9 serves as the hot end 5 . The sensor 1 is based on a silicon substrate 6, and the middle SiO 2 Layer 7 is an insulating layer to prevent the transfer of the collected thermal energy to the substrate 6 . Below the silicon substrate 6 is a heat conduction plate 9 , and the upper layer covers a heat sink plate 8 . Si substrate 6 with SiO 2 The heat ...
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