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Infrared imaging spectrometer based on light beam splitter and manufacturing method

A technology of infrared imaging spectrometer and beam splitter, which is applied in the fields of optics, instruments, spectrum investigation, etc. It can solve the problems of large volume and poor real-time performance of beam splitting devices, and achieve the effects of large luminous flux, stable structure, and high signal-to-noise ratio

Active Publication Date: 2014-07-09
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The present invention provides an infrared imaging spectrometer based on a light beam splitter and a manufacturing method to solve the problems of large beam splitters and poor timeliness in existing spectroscopic instruments.

Method used

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  • Infrared imaging spectrometer based on light beam splitter and manufacturing method
  • Infrared imaging spectrometer based on light beam splitter and manufacturing method
  • Infrared imaging spectrometer based on light beam splitter and manufacturing method

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specific Embodiment approach 1

[0029] Specific implementation mode 1. Combination Figure 1 to Figure 2 To illustrate this embodiment, the infrared imaging spectrometer based on a lightweight beam splitter is composed of a front imaging system 1, an interference system 2, a rear imaging beam reduction system 3 and an infrared CCD 4, and the interference system 2 includes a grid type beam splitter 6. Multi-level stepped micro-mirror 7 and plane mirror 5; at a certain moment, the light emitted by the ground target object is imaged by the front-end imaging system and then divided into two beams of coherent light with the same intensity by the grid-type beam splitter 6. The beam of light is reflected by the beam splitter and is imaged on the plane mirror 5 , and the other beam of light is transmitted by the grid beam splitter 6 and then imaged on the multi-level stepped micro-mirror 7 . Wherein the different reflective surfaces of the multi-level stepped micro-mirror 7 correspond to images formed in a certain fie...

specific Embodiment approach 2

[0036] Specific embodiment two, combine Figure 4 to Figure 6 Describe this embodiment, this embodiment is the manufacturing method of the infrared imaging spectrometer based on the light beam splitter described in the specific embodiment 1, this method is realized by the following steps:

[0037] a. To make the substrate of the imaging spectrometer, select aluminum, copper, titanium, stainless steel or silicon as the substrate material, use the substrate material to make the substrate of the system according to the designed size requirements, and polish the upper surface; the roughness of the polished surface is less than or equal to 10 Micron, the flatness is less than or equal to 50 microns.

[0038] b. Make reference lines perpendicular to each other on the polished substrate by precision machining or photolithography and etching based on MOEMS technology as reference lines for the first optical axis and the second optical axis. According to the analysis and calculation, ...

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Abstract

The invention discloses an infrared imaging spectrometer based on a light beam splitter and a manufacturing method and relates to the field of earth observation imaging spectrometers. In order to solve the problems that an interference beam splitting system in an existing imaging spectrometer is large in size, the light weight of the system cannot be conveniently achieved, a slit related to the spatial resolution is contained in the system, and the luminous flux entering the system is limited, a grid type beam splitter system is introduced in to replace a beam splitter and a compensation board in the system, and the advantages of the small size and the light weight are achieved. The light weight of the system is achieved, meanwhile, convenience is brought to design of a whole optical system, the system does not contain a slit, compared with a spatial modulation Fourier transform imaging spectrometer, the luminous flux of the system is greatly improved, the slit in the spatial modulation Fourier transform imaging spectrometer is removed, the high spectral resolution is achieved, and meanwhile the signal to noise ratio of the system is effectively improved. The infrared imaging spectrometer is based on a Michelson interferometer structure, and the reliability of the system is greatly improved.

Description

technical field [0001] The invention relates to the field of making an imaging spectrometer for earth observation, and relates to a method for making a space-time joint modulation imaging spectrometer, in particular to a method for making a space-time joint modulation infrared Fourier transform imaging spectrometer system based on a grid-type beam splitter. Background technique [0002] Imaging spectrometer is an important tool for ground remote sensing detection. It combines the characteristics of multispectral imager and spectrometer, and truly realizes the detection of objects with "map and spectrum integration". Therefore, it is widely used in space remote sensing, military target detection, geological resource exploration, environmental monitoring, meteorological analysis and other fields. According to its working principle, it is mainly divided into two types: dispersion type and Fourier transform type. The dispersive imaging spectrometer can directly obtain the spect...

Claims

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Application Information

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IPC IPC(8): G01J3/28G02B27/10
Inventor 梁中翥王维彪梁静秋吕金光秦余欣田超王文丛
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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