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Spatial modulation Fourier transform infrared spectrometer based on MOEMS technology

A technology of Fourier transform and infrared spectrometer, which is applied in the field of spatially modulated Fourier transform infrared spectrometer based on MOEMS technology, which can solve the problems of online reliability limitation, FTIR volume, and heavy weight, etc., to improve real-time performance and eliminate dispersion Effect and loss of light energy, satisfying the effect of light weight and miniaturization

Active Publication Date: 2014-07-09
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The invention solves the problem that FTIR has a large volume and weight and limited online reliability in the prior art, and provides a spatially modulated Fourier transform infrared spectrometer based on MOEMS technology

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  • Spatial modulation Fourier transform infrared spectrometer based on MOEMS technology
  • Spatial modulation Fourier transform infrared spectrometer based on MOEMS technology
  • Spatial modulation Fourier transform infrared spectrometer based on MOEMS technology

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specific Embodiment approach 1

[0013] Specific implementation mode 1. Combination Figure 1 to Figure 6 Illustrate this embodiment, the spatially modulated Fourier transform infrared spectrometer based on MOEMS technology includes a collimation system 2, a sample cell 3, an interference system 4, a microlens array 5 and an infrared detector 6, and the interference system 4 includes a grid type beam splitter 7, multi-level large-step micro-mirror 9 and multi-level small-step micro-mirror 8, the light emitted by infrared light source 1 passes through collimation system 2 and sample cell 3 in sequence, and then is transmitted by grid type beam splitter 7 into two coherent beams. One beam is incident on the multi-level large step micro-mirror 9 , and returns to the grid-type beam splitter 7 after being reflected by the multi-level large step mirror 9 . Another beam of light is incident on the multi-level small step micro-mirror 8 , and returns to the grid-type beam splitter 7 after being reflected by it. Afte...

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Abstract

The invention discloses a spatial modulation Fourier transform infrared spectrometer based on the MOEMS technology and relates to the field of spectrum analysis instruments. The spatial modulation Fourier transform infrared spectrometer solves the problems that the FTIR is adopted in the prior art, the size is large, the weight is high, and online reliability is limited. The infrared spectrometer is based on the Michelson interferometer principle, two multistage step reflectors which are arranged in an orthogonal mode are used for replacing a movable mirror system and a fixed mirror in a system, staticizing of the system is achieved, and meanwhile the reliability, the repeatability and the real-time performance of the system are greatly improved. Real-time and online measurement on unknown objects is conveniently achieved. A grid type beam splitter is used for replacing a beam splitter and a compensating plate in a traditional Fourier transform spectrometer, the light weight of the system is achieved, a micro-reflector array is used for replacing a beam contracting system in the traditional Fourier transform spectrometer, and the requirement for the light weight and the microminiaturization of the spectrometer can be better met.

Description

technical field [0001] The invention belongs to the field of spectral analysis instruments, and relates to a novel spatially modulated infrared Fourier transform spectrometer system, in particular to a spatially modulated Fourier transform infrared spectrometer based on MOEMS technology. Background technique [0002] Infrared spectroscopy instruments can perform high-precision spectral measurement, perform qualitative or quantitative analysis, and detect unknown substances, so they have been widely used in many fields. At present, there is an urgent need for high-precision, miniaturized and lightweight infrared spectral analysis systems in the fields of environmental and security monitoring, medical analysis and detection, space detection, meteorological or resource detection, military ground object reconnaissance and analysis, and anti-terrorism and chemical defense. Fourier transform infrared spectrometer (FTIR) has the advantages of multi-channel, large radiation flux, lo...

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Application Information

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IPC IPC(8): G01J3/45G01J3/02
Inventor 王维彪吕金光梁中翥梁静秋田超秦余欣陈成
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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