Laser biaxial confocal Brillouin-Raman spectroscopy measurement method and device
A technology of Raman spectroscopy and measurement methods, applied in the field of microspectral imaging, can solve the problems of reducing the spatial resolution of confocal Raman spectroscopy detection, limiting the spatial resolution of confocal Raman spectroscopy detection, and long detection time, etc., to achieve Improve the ability of micro-region spectral detection, facilitate comprehensive testing, and improve the effect of measurement accuracy
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[0053] In this embodiment, the light source 1 is a laser, the polarization modulation system 29 is a radially polarized light generator, the dichroic light splitting system 8 is a Notch filter, the data processing system 21 is a computer, and the image acquisition system 11 is a CCD detector. 24 is a CCD detector, and the image magnification system 10 is a magnifying objective lens.
[0054] Such as figure 1 , figure 2 and Figure 5 As shown, the illumination objective lens 2 and the collection objective lens 7 are symmetrically distributed on both sides of the normal line 5 of the measurement surface, and the included angle between the illumination optical axis 4 and the normal line 5 of the measurement surface is θ 1 6. The angle between the collection optical axis 20 and the normal line 5 of the measurement surface is θ 2 31, where θ 1 = θ 2 , laser biaxial confocal Brillouin-Raman spectroscopy measurement method, the measurement steps are:
[0055] Firstly, the beam...
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