Micromachined Disk Resonator with Transversely Movable Electrodes

Abstract

The invention discloses a micro-mechanical disc resonator with electrodes capable of moving transversely. A vibration disc is supported by a bottom surface anchor, and a bias voltage welding spot is arranged on the disc. An alternating voltage welding spot is introduced on the input electrode, and an alternating current welding spot is introduced on the output electrode. The other end of the input electrode and the other end of the output electrode are respectively connected with a rectangular electrode stem, and the rectangular electrode stems are connected to rectangular elastic arms fixed through dot-shaped supports. The rectangular elastic arms are connected with the dot-shaped supports through electrode arms. Electric insulating layer silicon dioxide is arranged on the surfaces of the rectangular elastic arms and the surfaces of the electrode arms, and metal wires are laid on the electric insulating layer silicon dioxide. An external golden ball bonding technology is adopted, and driving current welding spots at the two ends of metal wires are connected to pins of a packaging shell through gold wires and connected into a constant current source. According to the micro-mechanical disc resonator, through the effect of ampere force, the electrodes move transversely and constantly, and the electrode structure is optimized. Through the transversely movable electrodes, the problem that gaps of the electrodes at the two ends are not matched due to fabrication errors is solved, therefore, motion electric resistance is reduced, and the performance of the resonator is improved.

Description

technical field [0001] The invention relates to a micromechanical resonator structure, in particular to a micromechanical disk resonator with laterally movable electrodes. Background technique [0002] Micro Electro Mechanical Systems (MEMS for short) is the broadening and extension of microelectronics technology. It is a system that integrates microelectronics technology and precision machining technology, and integrates microelectronics and machinery. Compared with macroscopic electromechanical devices, MEMS has the advantage of small size, and the thickness is generally not more than 1cm. In addition, MEMS devices can be produced in large quantities and at low cost with a process compatible with integrated circuits, so the cost performance is greatly improved compared with traditional manufacturing technologies. MEMS technology is the most suitable technology for developing intelligent products, which can improve the computing power of microelectronic products and the pe...

AI Technical Summary

Problems solved by technology

However, although the initial gap between the input and output electrodes and the vibrating disk is made by the same process of photolithography and etching, due to the non-ideality of the process, there will be a slight error in the gap between the electrodes on both sides.

This error will cause the actual motional resistance of the resonator to be higher than the theoretical value, and prevent the motional resistance of the resonator array from decreasing linearly relative to a single resonator

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