Electric field type time-grating angular displacement sensor

Abstract

The invention discloses an electric field type time-grating angular displacement sensor. The electric field type time-grating angular displacement sensor comprises a rotor and a stator, wherein the surface of a base body of the rotor is covered with a circle of dual-sinusoid electrodes which are arranged at equal intervals, the surface of the base body of the stator is evenly covered with a circle of fan-ring-shaped or curved-surface rectangular electrodes, a stator lead are arranged on the bottoms of the electrodes, an insulating layer is arranged between the electrodes and the lead, the surfaces of the electrodes are covered with an insulating protective layer, and thus a multi-layer structure is formed; the base body of the rotor and the base body of the stator are installed coaxially, and a certain gap delta is reserved between the base body of the rotor and the base body of the stator; the base body of the rotor rotates relatively around the axis; the four electrodes in a cycle of the stator are connected with a sinusoidal excitation voltage with a phase of 0 degree, a sinusoidal excitation voltage with a phase of 90 degrees, a sinusoidal excitation voltage with a phase of 180 degrees and a sinusoidal excitation voltage with a phase of 270 degree respectively, the amplitudes and the frequencies of the sinusoidal excitation voltages are equal, and the phases of traveling wave signals Uo generated by the electrodes of the rotor are compared with the phases of a path of fixed-phase reference signals Ur with the same frequency; the phase difference between the two paths of signals is represented by interpolated clock pulses, and an angular displacement value is obtained through conversion. The electric field type time-grating angular displacement sensor is simple in structure and low in power consumption, requirements for mechanical installation precision are low, and free high-precision angle displacement measurement within the range of 360 degrees can be achieved.

Description

technical field [0001] The invention belongs to a precision angular displacement measuring sensor. Background technique [0002] In the field of precision angular displacement measurement, a time grating sensor with clock pulse as the reference for displacement measurement has been developed in recent years, and a time grating angular displacement sensor based on alternating electric field has been developed on this basis. This sensor patent was published on April 25, 2012. Patent name: A time grating angular displacement sensor based on alternating electric field. Patent document number: CN102425987A. [0003] This time grating angular displacement sensor based on an alternating electric field uses a single-layer differential capacitor as a signal coupling channel, and requires two rings of electrodes to form two standing wave signals, and then synthesizes a traveling wave signal by an adding circuit. Since the length-to-width ratios of the two rings of electrodes processe...

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Problems solved by technology

[0004] The purpose of the present invention is to address the deficiencies of the above-mentioned prior art, and propose an electric field type time grating angular displacement sensor based on a single-turn multilayer structure, which uses electrodes based on a single-turn multilayer structure to solve the signal interaction between the two turns. Interference and inconsistency of electrode aspect ratio, avoiding the inconsistency of the two-circle electric field coupling strength caused by processing and installation; using the electric field coupling principle to directly obtain the traveling wave signal, without the need for an adding circuit; thus reducing measurement errors and reducing the impact on installation accuracy requirements, simplify the system structure

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