A medium-high temperature self-lubricating multi-arc ion plating multi-element gradient tool coating and its preparation method

A multi-arc ion plating and self-lubricating technology is applied to the high-temperature self-lubricating multi-element gradient tool coating, the preparation of the multi-element gradient coating, the surface coating strengthening treatment process of high-speed cutting tools, and achieves good application prospects, high hardness, improved Effect of Internal Stress Distribution

Active Publication Date: 2015-09-23
ANHUI UNIVERSITY OF TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the current literature, the literature on AlCrTiSiN coating is relatively rare, and the research direction is concentrated on the mechanical properties and high-temperature oxidation resistance of the coating. The self-lubrication phenomenon of AlCrTiSiN / AlCrN multi-component gradient tool coatings at medium and high temperatures Not yet reported

Method used

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  • A medium-high temperature self-lubricating multi-arc ion plating multi-element gradient tool coating and its preparation method
  • A medium-high temperature self-lubricating multi-arc ion plating multi-element gradient tool coating and its preparation method
  • A medium-high temperature self-lubricating multi-arc ion plating multi-element gradient tool coating and its preparation method

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Embodiment 1

[0042] Such as figure 1 and figure 2 As shown, a method for preparing a medium-high temperature self-lubricating multi-arc ion plating multi-element gradient tool coating of the present embodiment comprises the following steps:

[0043] (1), the first arc source 2, the second arc source 2 and the third arc source 2 are respectively placed in a symmetrical position inside the vacuum chamber 1, and Ar and N 2 The gas is introduced into the vacuum chamber 1 . Among them, the target of the first arc source is made of simple Cr with a purity of 99.99%; the target of the second arc source is made of AlCr powder metallurgy, the atomic percentage of Al and Cr is 70:30, and the purity of the AlCr target is 99.99%; the third arc source is made of AlTiSi powder metallurgy, the atomic percentage of Al, Ti and Si is 60:30:10, and the purity of the AlTiSi target is 99.99%;

[0044] (2) Choose a single crystal silicon wafer as the workpiece, the size of the workpiece is 20mm×10mm×0.54mm,...

Embodiment 2

[0053] Such as figure 1 and figure 2 As shown, a method for preparing a medium-high temperature self-lubricating multi-arc ion plating multi-element gradient tool coating of the present embodiment comprises the following steps:

[0054] (1)~(6), are identical with step (1)~(6) among the embodiment 1;

[0055] (7), keep N 2 The gas partial pressure is kept constant at 3Pa, the bias voltage is reduced to 50V, the third arc source is started, and the AlCrTiSiN working layer is deposited together with the second arc source for 90 minutes;

[0056] (8), the coating process is finished, the vacuum chamber 1 is cooled to room temperature, the furnace door is opened, and the workpiece is taken out.

[0057] The total thickness of the prepared coating is 2.45 μm, in which the thickness of the AlCrN gradient transition layer is 0.84 μm, and the thickness of the AlCrTiSiN working layer is 1.61 μm.

Embodiment 3

[0059] Such as figure 1 and figure 2 As shown, a method for preparing a medium-high temperature self-lubricating multi-arc ion plating multi-element gradient tool coating of the present embodiment comprises the following steps:

[0060] (1)~(6), are identical with step (1) to (6) among the embodiment 1;

[0061] (7), keep N 2 The gas partial pressure is kept constant at 3Pa, the bias voltage is increased to 120V, the third arc source is started, and the AlCrTiSiN working layer is deposited together with the second arc source for 90 minutes;

[0062] (8), the coating process is finished, the vacuum chamber 1 is cooled to room temperature, the furnace door is opened, and the workpiece is taken out.

[0063] The total thickness of the prepared coating is 3.13 μm, in which the thickness of the AlCrN gradient transition layer is 1.09 μm, and the thickness of the AlCrTiSiN working layer is 2.04 μm.

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Abstract

The invention discloses an AlCrTiSiN / AlCrN multiple-unit gradient tool coating, belonging to the technical field of material surface coating. The intermediate-high-temperature self-lubricating multiple-unit gradient coating is prepared by virtue of a multi-arc iron-plating technique and is in a three-layer gradient structure including a CrN layer, an AlCrN gradient transition layer and an AlCrTiSiN working layer, wherein the thickness of the AlCrN gradient transition layer is 0.84-1.09 microns, and the thickness of the AlCrTiSiN working layer is 1.61-2.36 microns; the AlCrTiSiN working layer comprises the following components in percentage by weight: 50%-70% of (Al,Cr)N solid solution and 30%-50% of (Al,Ti)N solid solution. The coating has excellent frictional wear performance due to a self-lubricating effect at an intermediate-high temperature (500 DEG C), a novel method is provided for developing similar high-end products by virtue of the multi-arc iron-plating technique, and the coating has good application prospect in high-speed cutting tools.

Description

technical field [0001] The invention belongs to the technical field of material surface coating, in particular to a high-speed cutting tool surface coating strengthening treatment process, especially to a high-temperature self-lubricating multi-element gradient tool coating in AlCrTiSiN / AlCrN, and the invention also relates to the preparation of the multi-element gradient coating method. Background technique [0002] The manufacturing industry plays a key role and position in the development of my country's national economy, and a strong manufacturing industry is an important foundation for realizing industrial modernization. With the development of modern manufacturing industry in terms of speed, efficiency, environmental protection and energy saving, the requirements for cutting tools are getting higher and higher, and coating technology is an important method to improve the processing performance and service life of cutting tools. [0003] Tool coating technology refers ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B32B15/04B32B9/04C23C14/32C23C14/06C23C14/16C23C14/18
Inventor 张世宏刘书媛李明喜陈汪林
Owner ANHUI UNIVERSITY OF TECHNOLOGY
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