A kind of sandwich structure microtube and its preparation method and application
A micro-tube and sandwich technology, which is applied in the field of sandwich-structured micro-tubes and their preparation, can solve the problems of different adsorption capacities, low detection sensitivity, and large differences in detection sensitivity.
Inactive Publication Date: 2017-04-05
FUDAN UNIV
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Problems solved by technology
[0004] However, the use of oxide self-coiled microtubules to detect the adsorption of water molecules is mainly restricted by two aspects: (1) Different oxide materials have different adsorption capabilities for water molecules, so the detection of water molecules by oxide self-coiled microtubules The sensitivity varies greatly, and a unified humidity detection scale cannot be established; (2) Overall, the detection sensitivity of humidity detection using oxide self-curling microtubes is extremely low
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[0027] The present invention is further described by examples below.
[0028] The preparation of sandwich microtubes by the invention will be further described below in conjunction with the accompanying drawings and specific examples.
[0029] Figure 1-6 A process for preparing a sandwich-structured microtube for the present invention, wherein: figure 1 As a Si substrate, spin-coat photoresist on the Si substrate as a sacrificial layer, and perform photolithography to obtain the following figure 2 The graphical structure shown. Using the method of electron beam evaporation, the outer wall film with a thickness of 12 nm and material of yttrium oxide was deposited on the sacrificial layer at a deposition rate of 3 Å / s; then the inner wall film with a thickness of 24 nm and material of zirconia was deposited. at a rate of 0.5 Å / s, such as image 3 shown. During the deposition process, the normal direction of the substrate is placed at an angle of 60 degrees to the inciden...
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Abstract
The invention belongs to the technical field of micro nano devices, and in particular relates to a sandwich-structural micron tube and a preparation method and application thereof. The sandwich-structural micron tube is prepared by the following steps: preparing a substrate, preparing a graphical sacrificial layer template on the substrate; depositing a double-layer oxide film with internal stress on the substrate and a sacrificial layer; selectively removing portion of the sacrificial layer between the oxide film and the substrate, releasing the oxide film, curling the oxide film into the micron tube; coating the inner wall and the outer wall of the micron tube with a polymer film. The sandwich-structural micron tube can be used as a humidity sensor for measurement. The details are as follows: the sandwich-structural micron tube is placed in sealed environment with adjustable humidity, when the environment humidity increases, the polymer absorbs water to swell, and the micron tube wall thickness increases. By measurement of changes in the resonant wavelength of the sandwich-structural micron tube, the environment humidity can be detected.
Description
technical field [0001] The invention belongs to the technical field of micro-nano devices, and in particular relates to a sandwich-structured micron tube, a preparation method and application thereof. Background technique [0002] The "whispering gallery mode" (whispering gallery mode, WGM) in the field of optics refers to the process in which light of a certain wavelength circulates around its interface in a medium with a higher refractive index. Optical resonators with "whispering gallery modes" have shown considerable potential in the detection of organisms, environments, nanoparticles, etc. due to their sensitivity to the surrounding environment medium, their own surface topography and their adsorbates. For example, in the field of biology, by measuring the change of the resonant wavelength of the optical resonant cavity, it is possible to detect the biological component environment in which it is located or whether there are viruses, protein molecules, etc. adsorbed on ...
Claims
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IPC IPC(8): G01N21/65B81C1/00
Inventor 张静钟健王娇黄高山崔旭高梅永丰
Owner FUDAN UNIV