CoCrPt-oxide magnetic recording target, film and preparation method thereof

An oxide and magnetic recording technology, applied in the field of information storage, to achieve the effect of small and uniform grain size, small and uniform grain size, and low element content

Inactive Publication Date: 2014-09-24
SINO PLATINUM METALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In fact, the structure and properties of the CoCrPt-oxide magnetic recording film are also related to the structure and propert

Method used

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  • CoCrPt-oxide magnetic recording target, film and preparation method thereof
  • CoCrPt-oxide magnetic recording target, film and preparation method thereof
  • CoCrPt-oxide magnetic recording target, film and preparation method thereof

Examples

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Example Embodiment

[0035] The CoCrPt-oxide target material is prepared by a two-way vacuum hot pressing method, and the specific preparation method includes the following steps:

[0036] (1) Powder pretreatment: the original powder is ball milled and classified, the particle size of Co, Cr, Pt raw material powder is less than 5μm, and the particle size of oxide is less than 1μm;

[0037] (2) Powder mixing: the refined and classified powders are mixed uniformly by mechanical mixing;

[0038] (3) Powder filling: the uniformly mixed powder is filled into the graphite mold through the powder filling device;

[0039] (4) Powder sintering: the mold containing high-purity powder is sent to the vacuum hot-pressing sintering furnace for two-way vacuum hot-pressing sintering, the vacuum degree is 10 -2 ~10 -4 Pa, the sintering temperature is 1000~1500℃, the sintering pressure is 30~60MPa, and the holding time is 1~5h.

[0040] (5) Hot isostatic pressing: The ingot needs to be processed by hot isostatic pressing, th...

Example Embodiment

[0045] Example 1

[0046] The Co68Cr10Pt14-SiO of the present invention 2 The sputtering target is prepared by the following steps:

[0047] (1) Powder pretreatment: use Co, Cr, Pt and SiO above 3N5 2 As a raw material, the original powder is ball milled and classified. The particle size of the Co, Cr, Pt raw material powder is less than 5μm, and the SiO 2 The particle size is less than 1μm;

[0048] (2) Powder mixing: the refined and classified powder is based on the nominal composition Co68Cr10Pt14-SiO 2 For ingredients, use planetary ball milling to mix evenly;

[0049] (3) Powder filling: the uniformly mixed powder is filled into the graphite mold through the powder filling device, and the surface of the graphite mold is sprayed with an oxide layer;

[0050] (4) Powder sintering: the mold containing high-purity powder is sent to the vacuum hot-pressing sintering furnace for two-way vacuum hot-pressing sintering, the vacuum degree is 10 -2 ~10 -4 Pa, the sintering temperature is 1100...

Example Embodiment

[0054] Example 2

[0055] The difference from Example 1 is that the CoCrPt-SiO 2 The alloy target is Co60Cr10Pt18-SiO 2 . The vacuum hot pressing temperature of the alloy ingot is 1200°C.

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Abstract

The invention discloses a CoCrPt-oxide magnetic recording target, film and a preparation method thereof. The CoCrPt-oxide target includes one or several oxides selected from SiO2, TiO2, CrO, Cr2O3, Ta2O3, W2O3, Al2O3 and Y2O3, wherein the average grain size of the oxides is in the range of 3-20 mum. In the Alloy target, Co, Cr and Pt form an alpha-Co and epsilon Co two-phase Co based solid solution, which mainly comprises low temperature phase hexagonal epsilon-Co solid solution; the target has a thickness in the range of 2-6 mm, and magnetic susceptibility (PTF) value of 40%-60%. A magnetic recording layer of a magnetic recording medium prepared from the alloy target material is in preferred orientation growth of (002) crystal face, and in the X diffraction analysis, the X ray diffraction peak intensity ratio of the (002) crystal plane represented by the formula (1) is 70%-90%. The sputtering target provided by the invention has low content of harmful impurity elements, fine and uniform grain size, homogeneous chemical composition with small deviation from the nominal composition. The magnetic recording medium prepared from the above sputtering target material has uniform and fine grains, clear nonmagnetic grain boundaries, and excellent magnetic properties.

Description

technical field [0001] The invention relates to a CoCrPt-oxide magnetic recording target material, a thin film and a preparation method thereof, belonging to the field of information storage. Background technique [0002] With the rapid development of information and computer technology, the study of perpendicular magnetic recording media has attracted widespread attention. The perpendicular magnetic recording medium currently used is mainly composed of three layers with different functions, that is, the soft magnetic underlayer (soft magnetic underlayer, SUL) used to provide the return path of the read / write magnetic field, and reduce the interaction between the lower layer and the magnetic layer. An intermediate layer (non-magnetic intermediate layer, NMIL) that diffuses and regulates grain morphology in the magnetic layer, and a magnetic recording layer (magnetic recording layer, MRL) for recording information. Among them, the magnetic recording layer is the core part of...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/08G11B5/667
Inventor 张俊敏谭志龙王传军闻明毕珺沈月宋修庆管伟明
Owner SINO PLATINUM METALS CO LTD
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