Composition for forming passivation film, semiconductor substrate provided with passivation film and method for producing same, and solar cell element and method for producing same
A technology of passivation film and composition, which is applied in the manufacture of semiconductor/solid-state devices, semiconductor devices, electrical components, etc., can solve the problems of solar cell characteristics degradation, impossibility, insufficient aluminum content, etc., and achieve easy storage and stability Effect
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Embodiment 1
[0167] (Preparation of Passivation Film Forming Composition)
[0168] 2.00 g of tri-sec-butoxyaluminum and 2.01 g of terpineol were mixed to prepare an organoaluminum compound solution. Separately, 5.00 g of ethyl cellulose and 95.02 g of terpineol were mixed and stirred at 150° C. for 1 hour to prepare an ethyl cellulose solution. The obtained organoaluminum compound solution 2.16g and 3.00g of ethyl cellulose solutions were mixed, and the colorless transparent solution was prepared, and the composition 1 for passivation film formation was prepared. The content rate of ethyl cellulose in the composition 1 for passivation film formation was 2.9 %, and the content rate of the organoaluminum compound was 21 %.
[0169] The following evaluation was performed about the obtained composition 1 for passivation film formation. The evaluation results are shown in Table 1.
[0170] (Formation of passivation film)
[0171] A single-crystal p-type silicon substrate (manufactured by SU...
Embodiment 2
[0184] 4.79 g of tri-sec-butoxyaluminum, 2.56 g of ethyl acetoacetate, and 4.76 g of terpineol were mixed and stirred at 25° C. for 1 hour to obtain an organoaluminum compound solution. Separately, 12.02 g of ethyl cellulose and 88.13 g of terpineol were mixed and stirred at 150° C. for 1 hour to prepare an ethyl cellulose solution. Next, the composition 2 for semiconductor substrate passivation film formation was prepared by mixing 2.93 g of organoaluminum compound solutions, and 2.82 g of ethyl cellulose solutions to form a colorless and transparent solution. The content rate of ethyl cellulose in the composition 2 for passivation film formation was 5.9 %, and the content rate of the organoaluminum compound was 21 %.
[0185] Except having used the composition 2 for passivation film formation prepared above, the passivation film was formed on the preprocessed silicon substrate similarly to Example 1, and it evaluated similarly. The effective lifetime is 144μs.
[0186] Usi...
Embodiment 3
[0195] 4.96 g of tri-sec-butoxyaluminum, 3.23 g of diethyl malonate, and 5.02 g of terpineol were mixed and stirred at 25° C. for 1 hour to obtain an organoaluminum compound solution. The obtained organoaluminum compound solution 2.05g and the ethylcellulose solution 2.00g prepared similarly to Example 2 were mixed, the colorless and transparent solution was made, and the composition 3 for passivation film formation was prepared. The content rate of ethyl cellulose in the composition 3 for passivation film formation was 5.9 %, and the content rate of the organoaluminum compound was 20 %.
[0196] Except having used the composition 3 for passivation film formation prepared above, it carried out similarly to Example 1, and formed the passivation film on the preprocessed silicon substrate, and evaluated it similarly. The effective lifetime is 96μs.
[0197] Using the composition 3 for passivation film formation prepared above, the thixotropic ratio, storage stability, and printi...
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