Vertical lifting device for cassette

Abstract

The invention provides a vertical lifting device for a cassette. The vertical lifting device for the cassette comprises an installation flange, a lifting corrugated tube, a lifting sleeve, a connecting element and a vertically-installed linear motor, wherein the upper end of the lifting corrugated tube is connected with the cassette, and the lower end of the lifting corrugated tube is connected with the installation flange; the upper end of the lifting sleeve is connected with the lifting corrugated tube, the lower end of the lifting sleeve is connected with the connecting element, and the linear motor is connected with the connecting element; the linear motor is used for driving the connecting element to carry out a linear motion along a vertical direction, the connecting element is used for pushing the lifting sleeve to drive the lifting corrugated tube to move, and then drive the cassette to ascend or descend along the vertical direction. On one hand, the vertical lifting device for the cassette provided by the invention is capable of simplifying the mechanism of the drive portion of the whole lifting device, and convenient to detach, install and maintain; on the other hand, the vertical lifting device for the cassette provided by the invention is capable of eliminating various location errors brought by intermediate links, and improving the location accuracy thereof.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a vertical lifting device for a chip box. Background technique [0002] In the semiconductor manufacturing process, the wafers to be processed need to be gradually transferred from the atmospheric environment to the reaction chamber for process processing, such as etching process, physical vapor deposition, etc. [0003] Such as figure 1 As shown, the schematic diagram of the semiconductor equipment transmission system is given, including the cassette vertical lift device (VCE), cassette (Cassette), transmission chamber and reaction chamber. Transfer wafers between chambers. The vertical lifting device of the film box is located at the front end of the entire transmission system. Its main function is to push the film box to move in a straight line in the vertical direction through the transmission device, so that it can be achieved by only lifting the film box while keep...

AI Technical Summary

Problems solved by technology

[0010] 1. The device is relatively complicated, and it needs to be used in conjunction with belt drive, screw nut and linear guide rail. The assembly process is relatively cumbersome, and the structure is inconvenient to disassemble and maintain;

[0011] 2. The assembly accuracy of the parts is high, and the neutrality of the elastic connector is required when the screw nut is assembled with the elastic connector;

[0012] 3. Due to the large number of transmission stages, there will be errors in the transmission at all levels, resulting in low positioning accuracy of the device

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