Three-degree of freedom laser measuring system applied to mechanical equipment geometric error measurement

Abstract

The invention belongs to the technology of laser precision measurement, and particularly relates to a three-degree of freedom laser measuring system applied to mechanical equipment geometric error measurement. The three-degree of freedom laser measuring system comprises a beam splitter set, a polarizing beam splitter set, a movable reflector set and a fixed reflector set. By means of the technical scheme based on double-frequency laser interference, three physical items including one displacement item and two rotating items can be measured at the same time, the detecting time can be greatly shortened, the detecting efficiency can be improved, traceability is high, a sensing head is a passive device, heat interference cannot be introduced, a cable is not needed to output signals, and then an error caused by heat interference is eliminated. The three-degree of freedom laser measuring system is produced for special requirements, and is moderate in cost, high in precision, very high in applicability and market value and suitable for being applied to various complex mechanical devices such as an engine, an excavator, a generator, a locomotive, a numerical control machine tool and the like.

Description

technical field [0001] The invention belongs to laser precision measurement technology, in particular to a three-degree-of-freedom laser measurement system applied to geometric error measurement of mechanical equipment. Background technique [0002] With the development of modern processing technology and high-end equipment precision manufacturing, the requirements for the processing accuracy of CNC machine tools are getting higher and higher. In order to be able to produce and assemble high-precision precision machine tools that meet production needs, and keep the machine tools in a high-precision state. The detection of the geometric error of the machine tool will become an unavoidable problem. Only by detecting the geometric error of the machine tool can it be confirmed whether the produced machine tool meets the requirements, and the machining accuracy of the machine tool can be further improved, or the systematic error of the existing machine tool can be compensated. ...

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is that the system is complex, the measurement data cannot be traced back, and the heating of the active device affects the measurement results. In order to overcome the above shortcomings, a three-degree-of-freedom laser measurement system applied to the measurement of mechanical equipment geometric errors is provided.

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