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fe-pt-ag-c-based sputtering target dispersed with c particles and manufacturing method thereof

一种制造方法、溅射靶的技术，应用在溅射靶领域，能够解决异常放电、难以得到高密度烧结体、无法制造出等问题，达到粉粒量降低的效果

Active Publication Date: 2017-02-22
JX NIPPON MINING & METALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] In addition, when a sputtering device is generally used to perform sputtering using a sputtering target containing a non-magnetic material in an alloy, there are problems such as accidental detachment of the non-magnetic material during sputtering or damage caused by voids contained in the sputtering target. Abnormal discharge occurs as the starting point, resulting in powder particles (dust attached to the substrate (gomi))
However, when a large amount of C is contained in the Fe-Pt-based material, since C is a difficult-to-sinter material, it is difficult to obtain a high-density sintered body, and in particular, it is impossible to manufacture Fe-Pt-containing C particles with a relative density of 93% or more. Ag-C based sintered body sputtering target

Method used

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  • fe-pt-ag-c-based sputtering target dispersed with c particles and manufacturing method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0073] As raw material powders, Fe powder with an average particle diameter of 3 μm, Pt powder with an average particle diameter of 3 μm, Ag powder with an average particle diameter of 2 μm, and C powder with an average particle diameter of 1 μm were prepared. First, Fe powder, Pt powder, and C powder were weighed in a total weight of 3000 g according to the following atomic number ratio.

[0074] Atomic ratio: (Fe 50 -Pt 50 ) 52.94 -C 47.06

[0075] Next, the weighed powder was enclosed in a ball mill jar with a capacity of 10 liters together with zirconia balls as a grinding medium, and rotated for 4 hours to perform mixing and grinding. Then, the powder taken out of the tank is filled into a carbon mold, molded and sintered using a hot press device. The hot pressing conditions were: vacuum atmosphere, heating rate 300° C. / hour, holding temperature 1400° C., holding time 2 hours, and pressurization at 30 MPa from the start of heating to the end of holding. Cool natural...

Embodiment 2

[0086] As raw material powders, Fe powder with an average particle diameter of 3 μm, Pt powder with an average particle diameter of 3 μm, Ag powder with an average particle diameter of 2 μm, and C powder with an average particle diameter of 1 μm were prepared. First, Fe powder, Pt powder, and C powder were weighed in a total weight of 3000 g according to the following atomic number ratio.

[0087] Atomic ratio: (Fe 50 -Pt 50 ) 56.25 -C 43.75

[0088] Next, the weighed powder was enclosed in a ball mill jar with a capacity of 10 liters together with zirconia balls as a grinding medium, and rotated for 4 hours to perform mixing and grinding. Then, the powder taken out of the tank is filled into a carbon mold, and molded and sintered using a hot press device. The hot pressing conditions were: vacuum atmosphere, heating rate 300° C. / hour, holding temperature 1400° C., holding time 2 hours, and pressurization at 30 MPa from the start of heating to the end of holding. Cool nat...

Embodiment 3

[0105] As raw material powders, Fe powder with an average particle diameter of 3 μm, Pt powder with an average particle diameter of 3 μm, Ag powder with an average particle diameter of 2 μm, and C powder with an average particle diameter of 1 μm were prepared. First, Fe powder, Pt powder, and C powder were weighed in a total weight of 3000 g according to the following atomic number ratio.

[0106] Atomic ratio: (Fe 65 -Pt 35 ) 42.11 -C 57.89

[0107] Next, the weighed powder was enclosed in a 10-liter ball mill jar together with zirconia balls as a grinding medium, and rotated for 4 hours to perform mixing and grinding. Then, the powder taken out of the tank is filled into a carbon mold, and molded and sintered using a hot press device. The hot pressing conditions were: vacuum atmosphere, heating rate 300° C. / hour, holding temperature 1400° C., holding time 2 hours, and pressurization at 30 MPa from the start of heating to the end of holding. Cool naturally in the chambe...

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Abstract

A sintered body sputtering target, which has (Fe100‑X‑PtX)100‑Y‑Z‑AgY‑CZ (wherein, X is a number satisfying 35≤X≤55, and Y is satisfying 0.5 The Fe-Pt-Ag-C-based sintered body sputtering target with a composition of ≤Y≤15, Z being a number satisfying 15≤Z≤55), and a relative density of 93% or more. A method for manufacturing a Fe-Pt-Ag-C-based sintered body sputtering target, which is a method for manufacturing an Fe-Pt-Ag-C-based sputtering target, characterized in that the Fe-Pt-C sintered body is made in advance, The sintered body is pulverized to obtain pulverized powder, which is mixed with Ag powder and sintered at a temperature lower than the melting point of Ag. An object of the present invention is to provide a high-density sputtering target capable of producing a magnetic thin film having a granular structure without using an expensive co-sputtering device and reducing the amount of particles generated during sputtering.

Description

technical field [0001] The present invention relates to a sputtering target used for forming a granular magnetic thin film in a heat-assisted magnetic recording medium, and to a Fe-Pt-Ag-C-based sputtering target dispersed with C particles and a manufacturing method thereof. Background technique [0002] In the field of magnetic recording represented by hard disk drives, materials based on Co, Fe, or Ni, which are ferromagnetic metals, are used as materials for magnetic thin films in magnetic recording media. For example, a Co-Cr-based or Co-Cr-Pt-based ferromagnetic alloy containing Co as a main component is used as a magnetic thin film of a hard disk employing an in-plane magnetic recording method. [0003] In addition, composite materials containing Co-Cr-Pt-based ferromagnetic alloys containing Co as a main component and non-magnetic inorganic particles are often used for magnetic thin films of hard disks using the perpendicular magnetic recording method that has been pu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34G11B5/851
CPCG11B5/851C23C14/3414C22C5/04C22C38/002C22C38/007C22C33/0278B22F2998/10C22C2202/02B22F3/10H01J37/3429B22F9/04B22F1/09B22F2301/00B22F2302/40
Inventor 佐藤敦高见英生
Owner JX NIPPON MINING & METALS CORP
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