Method and device for high-resolution roll angle measurement based on heterodyne interferophase method

Abstract

The invention discloses a high-resolution roll angle measurement method and device based on heterodyne interferometric phase method, which includes a transverse Zeeman dual-frequency laser and a beam splitting prism located in the optical path of its outgoing light, and a reflective optical path of the beam splitting prism. The first analyzer and the first photoelectric receiver; a 1 / 2 wave plate is arranged in the transmission light path of the dichroic prism, the 1 / 2 wave plate is located in the middle of the plane mirror array, and the final exit light path of the 1 / 2 wave plate is set There is a phase delay film and a right-angle reflective prism, and a second analyzer and a second photoelectric receiver are arranged in the reflection light path of the right-angle reflective prism; the first photoelectric receiver and the second photoelectric receiver are connected to the phase meter, and the output terminal of the phase meter Connected with the industrial computer, the present invention utilizes the superposition of the polarized light effect when the 1 / 2 wave plate is used in conjunction with the plane mirror array, and places it in the plane mirror array, and uses it together with the phase retarder to further improve the roll rate. Resolution of angle measurement.

Description

technical field [0001] The invention belongs to the field of photoelectric measurement of angles, in particular to a high-resolution roll angle measurement method and device based on a heterodyne interferophase method. Background technique [0002] Roll angle error is an important part of the geometric error of high-end machine tools. Its accuracy is one of the important reference indicators to measure the performance and machining accuracy of machine tools. Its measurement technology level is the premise and basis for error compensation and high-precision machining of high-end machine tools. [0003] There are generally three angle errors in the kinematic pair of mechanical guide rails, namely pitch angle error, yaw angle error and roll angle error. Among them, pitch angle and yaw angle errors can be measured by high-precision laser interferometers, and the measurement technology is mature and can achieve high precision; for roll angle errors, since the error direction is p...

AI Technical Summary

Problems solved by technology

However, the above method has strict position accuracy requirements for the optical components in the optical path. A 1° position error of the 1 / 4 wave plate in the plane perpendicular to the optical axis will make the measured value of the system equal to twice the true value, and the measurement system will fail.

This makes it difficult to debug and install the corresponding measurement system, and it is difficult to guarantee the anti-interference performance

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