Highly-integrated electromagnetic bistable-state MEMS relay and manufacturing method of highly-integrated electromagnetic bistable-state MEMS relay

Abstract

The invention discloses a highly-integrated electromagnetic bistable-state MEMS relay and a manufacturing method of the highly-integrated electromagnetic bistable-state MEMS relay. The relay is an MEMS device which is characterized in that all relay systems for electromagnetic driving, elastic supporting, signal switching and the like and a permanent magnet are integrated on a single substrate. The manufacturing method includes the steps of conducting seed layer sputtering, photoresist spin coating and insulating layer forming on the substrate, forming a planar coil, a closed magnet yoke, a cantilever beam, an elastic platform, a magnet yoke platform, a movable contact, a fixed contact, a signal line and a supporting structure through the photoetching process, the electroplating process and the like, forming air gaps with the release method, and installing the permanent magnet on the elastic platform to form the complete relay. All the systems of the electromagnetic bistable-state MEMS relay are integrated on the single substrate with the MEMS technology, the integration level is improved, the size of the relay is reduced, power dissipation of the relay is reduced, work reliability of the relay is guaranteed, the manufacturing technology is simplified, and the highly-integrated electromagnetic bistable-state MEMS relay and the manufacturing method are suitable for industrialization volume production.

Description

technical field [0001] The invention relates to a highly integrated electromagnetic bistable MEMS relay and a preparation method thereof, belonging to the technical field of micro-electronic machinery. Background technique [0002] A relay is a kind of "automatic switch" that controls the operation of a large current through a small current, and switches the circuit by automatically turning on / off. In the circuit, through remote control, the relay can be used to realize functions such as safety protection and circuit switching, and is widely used in power management, instrumentation, automatic control and communication connection and other fields. [0003] In today's relay market, communication relays have occupied more than 25% of the share. Communication relays are mainly used in networks, instrumentation, automatic control and other occasions where switching can be performed remotely or indirectly. With the development of information technology, communication has transf...

AI Technical Summary

Problems solved by technology

However, the preparation method of the three-dimensional solenoid coil is complicated, and the cost of LIGA technology is high, the efficiency is low, and the number of coil turns contained in the single-chip manufacturing coil is relatively small due to the limitation of the external size.

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