ZnO-based sputtering target and photovoltaic cell having passivation layer deposited using the same
A photovoltaic cell and sputtering target technology, which is applied in photovoltaic power generation, sputtering coating, coating, etc., can solve the problems of photovoltaic cell efficiency reduction, achieve the effects of improving uniformity, reducing interface diffusion, and improving efficiency
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[0045] A buffer layer is formed by depositing cadmium sulfide (CdS) on a light absorbing layer made of copper indium gallium selenide (CIGS) compound. A passivation layer was formed on the buffer layer by direct current (DC) sputtering using a gallium oxide doped zinc oxide (GZO) target. A transparent electrode (TCO) was formed on the passivation layer by DC sputtering using a Ga-Al-Zn-O (GAZO) target. Then, the properties of the resulting structures were analyzed.
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