Electric fuse structure

An electric fuse and fuse technology, applied in circuits, electrical components, electric solid devices, etc., can solve the problems of long electric fuse length, large integrated circuit chip area, and metal interconnection layout design restrictions, etc. small area effect

Active Publication Date: 2017-09-26
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to make the existing electric fuse structure easier to be blown, the length of the electric fuse 3 is relatively large, causing the electric fuse structure to occupy a large area of ​​the integrated circuit chip, so that the layout design of the metal interconnection lines in the integrated circuit chip is subject to many constraints. limit

Method used

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  • Electric fuse structure
  • Electric fuse structure
  • Electric fuse structure

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0036] like figure 2 As shown, the electric fuse structure 1 of this embodiment includes: an electric fuse 30, and the electric fuse 30 includes five sub-fuses connected end to end, and the five sub-fuses are respectively: sub-fuses 301, sub-fuses 302, A sub-fuse 303, a sub-fuse 304, and a sub-fuse 305; an anode 10 and a cathode 20 respectively located at both ends of the electric fuse 30 and connected to the electric fuse 30, the anode 10 has a first front 101 facing the cathode 20, The cathode 20 has a second front 201 facing the anode 10, the first front 101 is parallel to the second front 201, and the facing area of ​​the first front 101 and the second front 201 is equal to the area of ​​the first front 101 and the area of ​​the second front 201. area. in:

[0037] The sub-fuse 301 is connected to the first front surface 101 of the anode 10, and the angle B1 between the two is 90 degrees; the sub-fuse 301 is connected to the sub-fuse 302, and the angle A1 between the tw...

no. 2 example

[0043] The difference between the second embodiment and the first embodiment is: as image 3 As shown, the electric fuse 30 includes seven segments of sub-fuse connected end to end. Fuse 306, sub-fuse 307. in:

[0044]The sub-fuse 301 is connected to the first front surface 101 of the anode 10, and the angle B1 between the two is 90 degrees; the sub-fuse 301 is connected to the sub-fuse 302, and the angle A1 between the two is 90 degrees; The sub-fuse 302 is connected to the sub-fuse 303, and the angle A2 between the two is 90 degrees; the sub-fuse 303 is connected to the sub-fuse 304, and the angle A3 between the two is 90 degrees; the sub-fuse 304 It is connected to the sub-fuse 305, and the angle A4 between the two is 90 degrees; the sub-fuse 305 is connected to the sub-fuse 306, and the angle A5 between the two is 90 degrees; the sub-fuse 306 and the sub-fuse 307 The sub-fuse 307 is connected to the second front surface 201 of the cathode 20, and the angle B2 between th...

no. 3 example

[0048] The difference between the third embodiment and the first embodiment is: as Figure 4 As shown, the electric fuse 30 includes seven segments of sub-fuse connected end to end. Fuse 306 , sub-fuse 307 ; in addition, the anode 10 has a first side 102 connected to the first front 101 , and the cathode 20 has a second side 202 connected to the second front 201 . in:

[0049] The sub-fuse 301 is connected to the first side 102 of the anode 10, and the angle B1 between the two is 90 degrees; the sub-fuse 301 is connected to the sub-fuse 302, and the angle A1 between the two is 90 degrees; The sub-fuse 302 is connected to the sub-fuse 303, and the angle A2 between the two is 90 degrees; the sub-fuse 303 is connected to the sub-fuse 304, and the angle A3 between the two is 90 degrees; the sub-fuse 304 It is connected to the sub-fuse 305, and the angle A4 between the two is 90 degrees; the sub-fuse 305 is connected to the sub-fuse 306, and the angle A5 between the two is 90 deg...

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Abstract

The invention discloses an electric fuse structure, comprising: an electric fuse, the electric fuse includes at least three sections of end-to-end sub-fuses, and the angle between the end-to-end sub-fuses is greater than 0 degrees and less than 180 degrees; An anode and a cathode respectively located at both ends of the electric fuse and connected to the electric fuse. The distance between the anode and the cathode can be reduced under the premise of ensuring that the electric fuse has a relatively long length so that the electric fuse structure is more likely to be blown, thereby reducing the area occupied by the electric fuse structure on the integrated circuit chip. When synchronously forming the electric fuse structure and the metal interconnection on the integrated circuit chip, the layout design of the metal interconnection in the integrated circuit chip has more choices.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an electric fuse structure. Background technique [0002] As feature sizes continue to decrease, semiconductor devices are increasingly susceptible to impurities or defects in the silicon substrate, and the failure of a single diode or MOS transistor often leads to the failure of the entire integrated circuit chip. In order to solve the above problems and improve the yield, some redundant circuits are often formed in the integrated circuit chip. When it is found that some devices cannot work normally after the completion of the manufacturing process, the failed circuit can be electrically isolated from other circuit modules by blowing the fuse structure, and the original failed circuit can be replaced with a redundant circuit. Especially in the manufacturing process of memory, due to the large number of memory cells, it is inevitable that some memory cells will fail, so s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L23/525
Inventor 孙光宇
Owner SEMICON MFG INT (SHANGHAI) CORP
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