A kind of LED structure and manufacturing method thereof
A technology of LED structure and manufacturing method, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of increased production cost, limited space for brightness improvement, and no improvement in luminous efficiency, and achieves the effect of reducing manufacturing cost and cost.
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Embodiment 1
[0083] Figure 1 to Figure 8 A schematic diagram of the cross-sectional structure during the fabrication of the patterned substrate provided in this embodiment, Figure 17 It is the flow chart of the patterned substrate manufacturing method of the present embodiment, below in conjunction with Figure 17 and Figure 1-8 A method for forming a patterned substrate according to a specific embodiment of the present invention will be described in detail.
[0084] Such as figure 1 As shown, step S11 is executed to provide an original substrate 100, which may be a silicon carbide (SiC) original substrate, a sapphire (Al2O3) original substrate or a silicon original substrate. In this embodiment, a sapphire substrate is used.
[0085] Such as figure 2As shown, step S12 is performed to form a first mask layer 110 on the original substrate 100 by evaporation, sputtering, spraying, PECVD or LPCVD. Preferably, a first mask layer 110 is formed on the surface of the original substrate ...
Embodiment 2
[0102] Such as Figure 9 As shown, the difference between the patterned substrate provided in this embodiment and the patterned substrate provided in Embodiment 1 lies in that the second pattern structure 102 is a cone-shaped structure.
[0103] In the method for fabricating the patterned substrate of the LED structure provided in this embodiment, on the basis of Embodiment 1, an additional etching for a predetermined time is performed (or the etching time of step S17 is directly extended), and then The second pattern structure 102 is changed from a mesa structure to a cone structure. The specific process parameters can be obtained through limited experiments according to the characteristics of the machine and the requirements of the thickness and corrosion resistance of the silicon dioxide to be formed.
[0104] Wherein, the positional relationship between the original substrate 100 and the first pattern structure 101 , the second pattern structure 102 , and the third patter...
Embodiment 3
[0106] Such as Figure 11 As shown, the difference between the patterned substrate provided by this embodiment and the patterned substrates provided by Embodiments 1 and 2 is that the first pattern structure 101 is a rectangular ring structure and the rectangular ring structure is along the The vertical section (section perpendicular to the surface of the original substrate) of each side in the width direction is triangular, and does not form several second pattern structures 102 and third pattern structures 103 .
[0107] Such as Figure 18 As shown, the method for fabricating the patterned substrate of the LED structure provided in this embodiment includes the following steps:
[0108] Step S31, providing an original substrate 100;
[0109] Step S32, forming a first mask layer 110 on the original substrate 100;
[0110] Step S33, forming a patterned photoresist layer 120 on the first mask layer 110 by a photolithography process, and using the patterned photoresist layer 1...
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