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Method for measuring radius of tip of atomic force microscope through frequency spectrum of nanometer step

An atomic force microscope and spectrum measurement technology, which is applied in the field of micro-nano measurement, can solve the problems of reference structure geometric size error, method accuracy and low implementability, and achieve the effects of precise size, reduced error and accurate calculation

Inactive Publication Date: 2015-04-15
HARBIN INST OF TECH
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

This method is simple and can directly calculate the radius of the needle tip, but it is easily affected by the geometric size error of the reference structure, and it also has certain requirements for the preparation of the sample
At present, the existing evaluation methods have their own advantages and disadvantages, and each has its own scope of application, but the accuracy and practicability of the methods are still not very high, so it is necessary to study how to calculate the needle tip in a simple, effective and quantitative manner. Arc radius

Method used

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  • Method for measuring radius of tip of atomic force microscope through frequency spectrum of nanometer step
  • Method for measuring radius of tip of atomic force microscope through frequency spectrum of nanometer step
  • Method for measuring radius of tip of atomic force microscope through frequency spectrum of nanometer step

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specific Embodiment approach 1

[0018] Specific implementation mode 1: This implementation mode provides a method for measuring the tip radius of an atomic force microscope using a nano-step spectrum, and the specific steps are as follows:

[0019] Step 1: Establishment of the needle tip and step geometric model.

[0020] Such as figure 1 and 2 As shown, the tip of the atomic force microscope tip is idealized as a hemisphere and is tangent to the probe pyramid. When the height of the arc (the vertical height from the point of tangency between the needle point arc and both sides of the needle point to the lowest point of the arc) is higher than the step height, the shoulder of the edge of the step only contacts the needle point arc, and the false image is caused by the needle point arc. When the height of the arc is smaller than the height of the step, the shoulder of the edge of the step is not only in contact with the arc of the tip, but also interacts with the edge of the needle point, and the false imag...

specific Embodiment approach 2

[0034] Specific implementation mode two: select a used single crystal silicon probe, and scan the VGRP-15M sample produced by Bruker, Germany under the knocking mode of the atomic force microscope. The sample is composed of many square pits In the array structure, the depth of the square pit is about 180nm, and a local step structure is selected for scanning, and the scanning parameters are set according to the simulation parameters in Step 3 of the specific implementation mode. Perform off-line processing on the microscope image of the steps obtained, perform Fourier transform on the cross-section of the steps, and calculate the amplitudes of the second and fourth harmonics of the profile as 14.5nm and 13.8nm respectively, and combine these two values Putting y into equations (1) and (2) respectively, the tip radii are calculated to be 50.7nm and 49.1nm, so the average value of 50.4nm is taken as the final estimated value of the tip radius.

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Abstract

The invention discloses a method for measuring the radius of a tip of an atomic force microscope through frequency spectrum of a namometer step. The linear correspondence relation between the frequency spectrum of the step and the radius of the tip is obtained by analyzing the influence of the radius of the tip on a measurement result obtained through scanning of the nanometer step, and therefore, can serve as an assessement method of the radius of the tip. The method has the following advantages: the size of the step structure is accurate, and a geometric model in contact with the tip is simple; certain interference signals in images can be separated from useful signals in a frequency domain through frequency spectrum analysis, so the useful signals can be analyzed independently, the errors are reduced and the calculation is more accurate.

Description

technical field [0001] The invention belongs to the field of micro-nano measurement, and relates to a method for measuring the radius of an atomic force microscope needle, in particular to a method for measuring the arc radius of an atomic force microscope probe tip by using a spectrum of a step. Background technique [0002] The working principle of the atomic force microscope (AFM) is to make a certain interaction between the needle tip and the sample surface by applying a nanoscale vertical force to the needle tip, so as to realize the measurement of the sample surface. This enables AFM not only to measure the three-dimensional micro-nano topography of the surface, but also to study nanotribology and nanomechanics. Therefore, AFM is widely used in the fields of surface science, material science, electrochemistry, biology and metrology. But it is precisely because of the strong interaction between the tip and the sample that the tip will be worn during the measurement. T...

Claims

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Application Information

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IPC IPC(8): G01Q60/38
Inventor 闫永达薛勃胡振江赵学森
Owner HARBIN INST OF TECH
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