Ultrasonic 3D vibration and ELID (Electrolytic In-process Dressing) combined precision grinding system and method

Abstract

The invention provides ultrasonic 3D vibration and ELID (Electrolytic In-process Dressing) combined precision grinding system and method. The grinding system comprises a multi-channel ultrasonic generator, an ultrasonic objective table, an automatic distance adjusting electrode, a high frequency DC pulse power supply and a computer monitoring system; the computer monitoring system is used for synchronously acquiring ELID and 3D ultrasonic vibration state representation signal, observing the working state and mutual influence degree of each combination process, and then automatically or manually performing feedback control, so as to enable the two processes to be dynamically harmoniously and optimally matched; when in grinding and processing, a grinding wheel contacts with the grinding surface of a workpiece to cause an electrolyte ultrasonic cavitation phenomenon which can effectively prompt the actual grinding effect of the grinding wheel, and the grinding force is stable. According to the system and method, the ultrasonic grinding processing technology and the ELID grinding technology are combined and supplement each other in advantages, so as the overcome the defects of single process; the technical support is provided for the application of the efficient processing of ultra-smooth surface of a hard and brittle material in the high-tech fields such as national defense and aerospace.

Description

technical field [0001] The invention belongs to the technical field of precision manufacturing, and in particular relates to an ultrasonic 3D vibration compound ELID precision grinding system and a grinding method. Background technique [0002] The high-efficiency processing technology of mirror surface of hard and brittle materials is an important branch of ultra-precision processing technology, which is of great significance to the development of cutting-edge science and technology such as aerospace, national defense, information, microelectronics and optoelectronics. At present, the research on the conventional technology of mirror surface processing of hard and brittle materials is relatively mature, but the fatal disadvantages are low efficiency and high cost. In order to improve efficiency and surface quality, research on composite processing technologies such as ultrasonic grinding technology for hard and brittle materials, electrolytic online grinding wheel dressing ...

AI Technical Summary

Problems solved by technology

The disadvantage is that the grinding wheel is easy to block, the processing efficiency is low, the cost is high, and the non-conductive oxide peeled off from the diamond grinding wheel is easy to scratch the workpiece, etc.

[0004] Ultrasonic vibration precision grinding is a processing technology that combines ultrasonic vibration with ordinary grinding. The main advantage recognized in precision machining is that it can obtain precise ultra-precision surfaces while being efficient, but the disadvantage is to ensure the stability of the vibration of the acoustic system. The difficulty of performance, the grinding wheel cannot be trimmed on-line, and the nano-surface with extremely low roughness value (less than 10nm surface) cannot be obtained efficiently, such as the surface of ELID mirror grinding, etc. These problems also restrict the wide application of this technology in high-tech fields. main factors of application

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