Integrated narrowband micro light filter

A kind of optical filter, miniature technology, applied in the field of optical filter

Active Publication Date: 2015-04-29
XIAMEN UNIV
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  • Abstract
  • Description
  • Claims
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Embodiment 1

[0024] see figure 1 and 2 , present embodiment 1 is provided with substrate 11, is provided with one layer of dielectric thin film layer 12 with relatively high refractive index on substrate 11, is provided with one layer of dielectric thin film layer with relatively lower refractive index on dielectric thin film layer 12 13. A layer of periodic one-dimensional metal grating 14 is arranged on the dielectric thin film layer 13, and there are gaps 15 between the metal strips of the metal grating 14. The substrate 11 is selected from a transparent dielectric substrate or a semiconductor substrate (the semiconductor substrate can be the semiconductor base material used to make the involved optoelectronic devices). The dielectric thin film layer 12 selects insulating media such as silicon nitride, aluminum oxide, or other semiconductor materials with low absorption and high transmittance in the light band involved; the dielectric thin film layer 12 can also be a semiconductor opto...

Embodiment 2

[0026] see image 3 , similar to Example 1. The difference is that the metal grating is a mesh two-dimensional metal grating. The present embodiment 2 is provided with a substrate 21, on the substrate 21 is provided with a dielectric film layer 22 with a relatively high refractive index, on the dielectric film layer 22 there is a dielectric film layer 23 with a relatively low refractive index, On the dielectric thin film layer 23 there is a layer of periodic mesh two-dimensional metal grating 24 , and there are holes 25 in the mesh two-dimensional metal grating 24 . In this embodiment, the material selection of the substrate 21, the dielectric thin film layer 22, the dielectric thin film layer 23, and the two-dimensional metal grating 24 are respectively the same as those of the substrate 11, the dielectric thin film layer 12, the dielectric thin film layer 13, and the one-dimensional metal grating in Embodiment 1. The choice of material for the grating 14 is the same.

[0...

Embodiment 3

[0029] see Figure 4 , similar to Example 1. The difference is that the metal grating is an island-shaped two-dimensional metal grating. The present embodiment 3 is provided with a substrate 31, on the substrate 31 is provided with a dielectric thin film layer 32 with a relatively high refractive index, on the dielectric thin film layer 32 there is a dielectric thin film layer 33 with a relatively low refractive index, On the dielectric thin film layer 33 there is a layer of periodic island-shaped two-dimensional metal grating 34 . In this embodiment, the material selection of the substrate 31, the dielectric film layer 32, the dielectric film layer 33, and the two-dimensional metal grating 34 are respectively the same as those of the substrate 11, the dielectric film layer 12, the dielectric film layer 13, and the one-dimensional metal grating in Embodiment 1. The choice of material for the grating 14 is the same.

[0030] The selection range of the structural size of each...

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Abstract

The invention relates to a light filter, in particular to an integrated narrowband micro light filter. The integrated narrowband micro light filter is provided with a substrate, a dielectric film layer structure and a metal grating, wherein the dielectric film layer structure is arranged on the upper surface of the substrate and provided with at least two dielectric film layers; the refractive indexes of the dielectric film layers are different; the metal grating is arranged on the upper surface of the dielectric film layer structure and is a one-dimensional metal grating or two-dimensional metal grating. By adjusting the period of the grating and the refractive indexes and thickness of the dielectric film layers, the center wavelength and bandwidth of a passing band of the light filter can be adjusted. The integrated narrowband micro light filter is small in size and can be integrated and applied on a micro optical system and a photoelectric device conveniently. The integrated narrowband micro light filter is used for integrating the micro optical system or being integrated on the photoelectric device to achieve the light filtering function. The integrated narrowband micro light filter can be manufactured on a transparent dielectric substrate to serve as a unit element to be used on the micro optical system, and can also be integrated in the photoelectric device to serve as a structural unit so as to filter light reflected by the photoelectric device.

Description

technical field [0001] The invention relates to an optical filter, in particular to an integrated narrow-band micro optical filter based on a metal micro-nano structure. Background technique [0002] Optical filters are an important part of optical systems and optoelectronic devices. With people's demand for high-performance, intelligent, and portable optoelectronic products, the miniaturization and integration of optical filters has become an important technical issue. Transmissive ultra-thin filters with high quality and narrow bandwidth play an important role in micro-optical systems and devices. It can not only be an independent unit with filtering function, but also a structural unit of more complex optoelectronic devices. It is integrated in it to play a filtering function. [0003] For micro-filters, the cavity structure based on the Fabry-Perot resonance effect is the most commonly used and the effect is better [as involved in the following documents: 1. B.Y.Jung, ...

Claims

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Application Information

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IPC IPC(8): G02B5/20
CPCG02B5/20
Inventor 孙志军
Owner XIAMEN UNIV
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