Automation equipment for processing shield cutter by plasma
A technology of automation equipment and shield cutters, which is applied in the field of plasma processing, can solve the problems of low deposition rate, insignificant improvement of tool hardness, wear resistance or service life, and unsatisfactory bonding force between the film and the substrate, so as to improve production Efficiency, high hardness, and the effect of improving the service life
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[0017] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.
[0018] In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand...
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