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A kind of manufacturing method of microlens

A manufacturing method and microlens technology, which are applied in the photoengraving process of lens and pattern surface, instruments, etc., can solve problems such as poor process repeatability, and achieve the effect of improving process repeatability, simple process and easy realization.

Active Publication Date: 2019-02-01
UNIV OF SCI & TECH OF CHINA
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  • Claims
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Problems solved by technology

[0005] The purpose of the present invention is to propose a new method for making microlenses for the problem of poor process repeatability encountered in the process of making microlenses, by exposing negative photoresists and heating and reflowing to achieve effective microlens morphology. Control to improve process repeatability of microlens fabrication

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  • A kind of manufacturing method of microlens

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Effect test

example 1

[0027] Example 1, Fabrication of Concave Cylindrical Mirror Array

[0028] The planar structure of the concave cylindrical mirror array is a grating structure, and the effective control of the morphology of the microlens can be realized through the selection of the grating structure parameters, the selection of the photoresist and the selection of the corresponding process conditions. Taking the array period as 110 microns as an example, SU8 negative photoresist is selected to fabricate the concave cylindrical mirror array.

[0029] The dimensions of the planar structure are first given: a grating structure with a period of 110 μm, a duty ratio of 1:10, and a line length of 1 cm.

[0030] The specific production is as follows:

[0031] 1) Process the corresponding optical mask according to the dimensions given above;

[0032] 2) Clean the glass substrate, spin-coat SU8 photoresist, bake on a hot table at 96 degrees for 30 minutes, and obtain a SU8 photoresist layer with a th...

example 2

[0037] Example 2, the production of concave honeycomb lens array

[0038] The planar structure of the concave honeycomb lens array is a honeycomb structure, and the microlens morphology can be effectively controlled by selecting the parameters of the honeycomb structure, the photoresist and the corresponding process conditions. Taking an array period of 155 microns as an example, KMPR negative photoresist is selected to make a concave honeycomb lens array.

[0039] Firstly, the size of the planar structure is given: a honeycomb structure with a period of 155 microns. In order to improve the utilization rate of the light source by the lens array, the side width of the honeycomb structure is 5 microns.

[0040] The specific production is as follows:

[0041] 1) Process the corresponding optical mask according to the dimensions given above;

[0042] 2) Clean the glass substrate, spin-coat KMPR photoresist, bake on a hot table at 100 degrees for 15 minutes, and obtain a KMPR pho...

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Abstract

The invention discloses a manufacturing method of a micro lens. The method specifically comprises the following steps: 1) spinning a negative photoresist layer on a substrate; 2) realizing a planar structure of the micro lens by virtue of an exposure process based on a designed pattern; and 3) heating and refluxing and cooling to obtain an expected micro lens structure. The micro lens is manufactured for the first time by exposing the negative photoresist and heating and refluxing. As manufacture of the micro lens is not affected by the surface of the substrate and the thickness of the photoresist, the shape of the micro lens can be effectively controlled, so that the process repeatability for manufacture of the micro lens is improved. Moreover, as the method is suitable for different substrates, the micro lens can be integrated with a microstructure on the substrate, so that different application demands can be satisfied. The planar structure of the micro lens manufactured by the invention is realized by virtue of the exposure process, so that a gapless lens array can be manufactured, and the utilization ratio of the lens array on the light source is improved; the manufacturing method is simple in process and easy to realize.

Description

technical field [0001] The invention relates to a micro-nano processing technology, in particular to a micro-lens structure manufacturing technology, and in particular to a micro-lens manufacturing method. Background technique [0002] Microlens is a very important optical component. With the development of information technology, it has more and more applications in the fields of optics and optoelectronics. There are many methods of making microlenses, the most commonly used of which is the hot-melt method. The hot-melt method first uses photolithography and development to obtain a planar polymer microstructure, and then heats up the microstructure to melt and reflow. The polymer planar microstructure forms a curved surface under the action of surface tension during the reflow process, and forms a micro-convex lens structure after cooling. Although the process of making microlenses by hot-melt method is relatively simple, there are some problems in the method itself, whic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00G02B3/00
Inventor 刘刚熊瑛边锐张晓波田扬超
Owner UNIV OF SCI & TECH OF CHINA
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